Electrostatic actuation and control of micro robots using a post-processed high-voltage SOI CMOS chip

In Circuits and Systems (ISCAS), 2011 IEEE International Symposium on

Mustafa Emre Karagozler, A. Thaker, Seth Copen Goldstein, and David S. Ricketts

pages 2509–2512

May 1990

@inproceedings{ktgr11,
  author = {Karagozler, Mustafa Emre and Thaker, A. and Goldstein,
     Seth Copen and Ricketts, David S.},
  booktitle = {Circuits and Systems (ISCAS), 2011 IEEE International
     Symposium on},
  title = {Electrostatic actuation and control of micro robots using a
     post-processed high-voltage SOI CMOS chip},
  year = {2011},
  month = {May},
  pages = {2509--2512},
  keywords = {Si backside carrier substrate;electrostatic actuation
     electrodes;energy efficient control;low power digital
     design;micro robots;parasitic FET gates;post-processed
     high-voltage SOI CMOS chip;power conversion circuit;CMOS
     integrated circuits;electrodes;electrostatic
     actuators;microrobots;silicon-on-insulator;},
  keywords = {Si backside carrier substrate;electrostatic actuation
     electrodes;energy efficient control;low power digital
     design;micro robots;parasitic FET gates;post-processed
     high-voltage SOI CMOS chip;power conversion circuit;CMOS
     integrated circuits;electrodes;electrostatic
     actuators;microrobots;silicon-on-insulator;},
  doi = {10.1109/ISCAS.2011.5938114},
  issn = {0271-4302},
}

Related Papers

Si Backside Carrier Substrate;electrostatic Actuation Electrodes;energy Efficient Control;low Power Digital Design;micro Robots;parasitic FET Gates;post-processed High-voltage SOI CMOS Chip;power Conversion Circuit;CMOS Integrated Circuits;electrodes;electrostatic Actuators;microrobots;silicon-on-insulator;
	Electrostatic actuation and control of micro robots using a post-processed high-voltage SOI CMOS chip	bib
	Mustafa Emre Karagozler, A. Thaker, Seth Copen Goldstein, and David S. Ricketts. In Circuits and Systems (ISCAS), 2011 IEEE International Symposium on, pages 2509–2512, May 1990.
	@inproceedings{ktgr11, author = {Karagozler, Mustafa Emre and Thaker, A. and Goldstein, Seth Copen and Ricketts, David S.}, booktitle = {Circuits and Systems (ISCAS), 2011 IEEE International Symposium on}, title = {Electrostatic actuation and control of micro robots using a post-processed high-voltage SOI CMOS chip}, year = {2011}, month = {May}, pages = {2509--2512}, keywords = {Si backside carrier substrate;electrostatic actuation electrodes;energy efficient control;low power digital design;micro robots;parasitic FET gates;post-processed high-voltage SOI CMOS chip;power conversion circuit;CMOS integrated circuits;electrodes;electrostatic actuators;microrobots;silicon-on-insulator;}, keywords = {Si backside carrier substrate;electrostatic actuation electrodes;energy efficient control;low power digital design;micro robots;parasitic FET gates;post-processed high-voltage SOI CMOS chip;power conversion circuit;CMOS integrated circuits;electrodes;electrostatic actuators;microrobots;silicon-on-insulator;}, doi = {10.1109/ISCAS.2011.5938114}, issn = {0271-4302}, }

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