How is MEMS Useful to Others (and to You) ?
Why is MEMS Useful ?
MicroElectroMechanical Systems are
physically small, this is the reason why MEMS is useful. MEMS
used for sensors is useful because small sensors interfere less
with the environment they are measuring than larger devices. An
array of small sensors can also be used for redundancy. MEMS is
useful for actuators because the motion they deliver can be very
precise. MEMS devices can also be placed in small
spaces such as inside automobile engines, small
appliances, and living organisms to measure and/or affect their
environment. MEMS devices offer tight integration of
electronics with mechanical components, which results in
very lower power consumption and fast response
times. Dramatic cost savings are possible since no
assembly is required and standard VLSI processes are used
Cost Savings
MEMS devices are fabricated using standard VLSI manufacturing
processes. Therefore the efficiencies and economics of scale that
the semiconductor indistry has enjoyed is leveraged to fabricate
MEMS devices as well.
In addition, MEMS devices do not require any assembly; all
components are manufactured in their assembled positions.
Reliability and Redundancy
MEMS devices are less susceptible to the wear and tear that is
experienced by macro devices.
MEMS devices are manufactured in large numbers on a single silicon
wafer. Several MEMS components can be used to provide redundancy
for critical applications. Therefore, when a single MEMS device
fails, the overall performance of the system may only degrade
slightly, instead of experiencing a complete failure.
Performance
MEMS devices offer much better performance:energy consumption
ratios.
Precision control/actuation is possible with MEMS devies.
MEMS devices interfere less with the environment, in part due to
their low power consumption.
Miniaturisation
MEMS devices can fit into very small spaces, and can be used in
environments where space and fine control is at a premium.
Applications
MEMS devices are currently being used in applications where highly
accurate and reliable sensing is needed; where fine motion control
is required; where sustained system performance under various
failure modes is important.
MicroElectroMechanical Systems are
physically small, this is the reason why MEMS is useful. MEMS
used for sensors is useful because small sensors interfere less
with the environment they are measuring than larger devices. An
array of small sensors can also be used for redundancy. MEMS is
useful for actuators because the motion they deliver can be very
precise. MEMS devices can also be placed in small
spaces such as inside automobile engines, small
appliances, and living organisms to measure and/or affect their
environment. MEMS devices offer tight integration of
electronics with mechanical components, which results in
very lower power consumption and fast response
times. Dramatic cost savings are possible since no
assembly is required and standard VLSI processes are used