MEMS in the Automotive Industry


Introduction

Microelectromechanical Systems (MEMS) have played a role in automotive engine control in the form of MAP (Manifold Absolute Pressure) sensors since 1979. Today, many automobiles have one of these devices in their electronic engine control system.

Early 1990's vehicles saw the first silicon accelerometer for an airbag crash sensor application. These devices have obtained extensive coverage in the popular and trade press. However, with the exception of these two applications, vehicle design engineers have not opted to include MEMS devices into their systems.. The next five-to-seven years will provide significant opportunities MEMS devices - whether it be in entirely new applications or in the replacement of traditional technologies. This movement is being fueled by the following factors:

Certainly a significant current and future market for MEMS devices exists in the automotive sector. The worldwide MEMS market in 1995 was $2.7 billion (U.S.) with the automotive. sector comprising 41% or $1.0 Billion (U.S.). Projections for the year 2000 estimate the worldwide MEMS market at $12.2 billion (U.S.) with the automotive sector comprising 24% or $3.0 billion (U.S.).

Automotive Requirements

A number of stringent, performance environmental, reliability, and cost requirements are imposed on automotive components. The harsh under-hood automotive environment includes extreme temperature, shock, vibration, humidity, corrosive media, EMC, RFIs and a host of Other environments.

In addition, automotive components must be able to be produced in extremely large volumes, typically one million or more units per year. This is necessary not only from a vehicle demand point of view, but from the necessity to recoup the large investment' associated with fixed design and manufacturing costs. Operating lifetimes of up to 10 years/150,000 miles. and very low unit prices are also required; Essentially, we can consider automotive components to require the ruggedness of military parts with the price of consumer products. These qualities are inherent in MEMS.

Component cost is a significant factor in the selection criteria of automotive System designers. The total cost of a sensor/actuator frequently includes. the MEMS device, signal conditioning electronics (e.g., temperature compensation, filtering, amplification), package, connector/cable harness, and testing.

As a result. the cost of the MEMS device itself constitutes a minority of the total delivered component cost. Therefore, a significant challenge to achieve highly efficient design for manufacturability is imposed on all suppliers who wish to be successful in the automotive sector.

Unique MEMS Features

MEMS are well ousted for a wide variety of automotive applications. Due to their batch process manufacturing, large volumes of highly uniform devices can be created at relatively low unit cost. Since MEMS have no moving parts to wear out, they are extremely reliable. Silicon has provided itself as a material for sensors in many applications over the last 20 years in applications including military, consumer and automotive. Silicon's mechanical properties have been well documented.

With the advent of microprocessor compatibility imposed on many automotive sensor/actuator applications, silicon is uniquely qualified to provide high levels of monolithic vertical functional integration using .popular semiconductor and classical micromachining processing.

System Applications of MEMS

Safety

 Application

 Sensor Structure

 Status

 MEMs Opportunity

 Antilock Braking/Vehicle Dynamics/Suspension

 Steering Position/ Wheel Rotation

 Production

 Low

 Suspension

 Pressure

 Ltd. Production

 Med

 "

 Valve

 Future

 Low

 "

 Acceleration

 Ltd Production

 High

 "

 Rate

  Ltd Production

 High

 "

 Displacement

  Ltd Production

 Low

 Airbag

 Acceleration

 Production

 High

 Actuation

 Frontal Impact Pressure (Canister)

 Future

 High

 "

Displacement  Side-Impact 

 Ltd. Production

 Low

 "

Pressure

 Future

 Med.

 "

Acceleration (side Impact)

 Ltd. Production

 High

 Seat Occupancy

Presence/

 Ltd. Production

 Low

 "

Force Displacement 

 Ltd. Production

 Low

 Object Avoidance

 Presence/

 Ltd. Production

 Low

 "

 Displacement

 Future

 

 Navigation

Yaw Rate/Gyro 

Ltd. Production 

High 

 Navigation

Wheel Rotation 

Limited Production 

Low 

 

 

 

 

Source: Roger Grace Associates

Engine/Drive Train

 Applications

 Function

 Status

 MEMS Opportunity

Digital Engine Control:      
 Fuel

 Level

Production 

Low 

 Cylinder

 Pressure

 Future

Low 

 Manifold (MAP)

Pressure 

 Production

High 

 Barometric

Pressure 

Production 

High 

 Engine Knock

Vibration 

Ltd. Production 

Low 

 Mass Airflow

Flow 

Production 

Med 

 Exhaust Gas Analysis  Production  Low 
 Crankshaft Position  Major Production  Low 
 Camshaft Position   Ltd. Production  Low 
 Throttle Position   Ltd. Production  Low 
 EGR Pressure  Production  High 
 Fuel Pump Pressure   Ltd. Production  High 
Continuously Variable Transmission:      
  Temperature  Future  Low 
  Pressure  Future  High 
   Microvalve  Future  Low 
 Fuel Pressure  Ltd. Production  High 
 Injection Nozzle  Ltd. Production  High 
 Diesel Turbo Boost Pressure  Ltd. production   High
       
       

Source: Roger Grace Associates

Comfort, Convenience, Security

 Application

Function 

Status 

MEMs Opportunity 

 Seat

 Presence

 Ltd. Production

 Low

 Seat Control

 Valve

 Future

 Med

 "

 Displacement

 Future

 Low

 Climate

 Mass Air flow

 Future

 Med

 "

 Temperature

 Production

 Low

 "

 Humidity

 Future

 Low

 "

 Air Quality

 Future

 High

 Compressor

 Pressure

 Production

 High

 Compressor Control

 Temperature

 Production

 Low

 Security

 Proximity

Ltd. Production 

Low 

 "

Motion 

 Ltd. Production 

Low

 "

 Vibration

Ltd. Production  

Low 

 "

Displacement 

Ltd. Production  

Low 

 "

Keyless Entry 

Ltd. Production  

Low 

Source. Roger Grace Associates

Vehicle Diagnostics/Monitoring

Application   Function Status  MEMS Opportunity 
 Coolant Temperature  Production  Low 
 " Quality  Future  High 
 System Level  Ltd. Production  Low 
 Tire Pressure Pressure  Ltd. Production   High
 Engine Oil Pressure  Production  High 
 " Level  Production  Low 
 " Future  Med 
 " Quality  Future  Med 
 Brake Pressure  Ltd. Production  High 
 Brake System Level  Future  Low 
 Transmission Fluid Pressure  Ltd. Production  High
 " Level  Future   Low
 " Quality  Future  Med 
 Fuel  Pressure Future  High 
 Fuel System Level  Future  Low 
 " Pressure (EVAP)  Ltd. Production  High 
 Vehicle Speed Velocity  Production  Low 

Source: Roger Grace Associates