24779-A:
Special Topics in Controls and Robotics:
Micro/Nano-Robotics
Spring 2003, 12 Units
Course Hours:
TuTh 1:30-3:20 pm, SH 212
Office Hours:
??, SH 315
Course Objectives:
This first-time interdisciplinary
course focuses on the design, construction, analysis, and control of the
state-of-the-art micro/nano-robotic systems for the MechE, Robotics, ECE,
BioE, etc. students working on MEMS, nanotechnology, biotechnology, and robotics
fields. It would cover the micro/nanoscale physics, sensors, actuators,
manipulators, power sources, interfacing, robotic design, and control issues.
After the basic background, it would include the current trends in the literature,
detailed case studies, and guest lecturer talks. Active student participation,
interaction, and in-class discussions are the main objectives!
Course Flyer (PDF file)
Course Outline (PDF file)
Course Outline:
Introduction
- Micro/Nano-Robotic System
Overview
- Scaling Effects in the Physical
Parameters
- Micro/Nano-Robotic System
Examples Around the World
Micro/Nano-Physics
- Micro/Nanoforces: Van der
Waals, Capillary, Electrostatic, Double Layer, Hydration, etc. Forces
- Adhesion and Surface Energy
- Micro/Nano Scale Contact
Mechanics: Hertz, DMT, JKR, and MD Contact Mechanics Approaches
- Micro/Nanotribology
- Case Study: Adhesion
and Friction Mechanisms in Nature: Geckos, Insects, Spiders, etc.
Micro/Nano-Sensors
- Imaging Sensors (Far-Field
and Near-Field):
- Optical Microscopy: Reflective,
Inverted, Stereo, etc., Scanning Electron Microscopy (SEM), and Tunneling
Electron Microscopy (TEM).
- Scanning Probe Microscopy
(SPM)
- Scanning Tunneling Microscope
(STM)
- Atomic Force Microscope
(AFM)
- Case Study:
Micro/Nanophysics Modeling for AFM Probes
- Magnetic, Capacitance,
Thermal, etc. Microscopy
- Position Sensors: Capacitive
Sensors, Linear Variable Differential Transformer, Interferometric Sensors,
STM Tips based, etc.
- Force and Pressure Sensors:
Strain Gauges, Deflection Based: AFM, etc., Visual Force Sensing: Bending
Imaging, etc., Capacitive Force/Tactile Sensors
- Accelerometers, Gyroscopes,
Chemical Sensors, Flow Sensors, etc.
Micro/Nano-Actuators
- Piezoelectric Actuators
- Bending Type: Unimorph
and Bimorphs
- Stack Type: Piezotubes,
Thin-Film Type: ZnO, etc. films, Surface Acoustic Waves, PZT actuators as
also integrated sensors
- Electrostatic, Thermal, Ultrasonic,
Electro/Magnetostrictive, and Shape Memory Alloy Based Actuators
- Polymer Actuators, Dielectric
Elastomers, Carbon Nanotube (CNT) Actuators
- Biomolecular Motors
Energy (Power) Sources
- Lithium Thin Film Batteries,
Solar Cells, Micro Fuel Cells, (Electro)Magnetic Energy, Molecular Energy
(ATP), etc.
- Case Study: Harvesting Energy from Shoes
- Power transmission and efficiency
- Case Study: Biomolecular
Motors based Energy Sources
- Case Study: Medical
Microrobots inside the Human Body
Micro/Nano-Manipulators
- SPM Probes and Micro/Nanogrippers
- Case Study: Atomic
Manipulation Using STM
- Optical Tweezers and AC Electrokinetics
(Dielectrophoresis, etc.)
- Case Study: Bio-Manipulation
using Optical Tweezers and Dielectrophoresis
- Case Study: Carbon
Nanotube Manipulation using Nanoprobes
- Case Study: High
Density Data Storage using Nanoprobes
Manufacturing Techniques
- Micro/Nanofabrication, Micro/Nanoassembly,
Self-Assembly, Hybrid Integration, etc.
- Case Study: Precision
Micro/Nanoparticle Assembly (
under SEM)
- Case Study:
Guided Self-Assembly
Micro/Nano-Robot Design Strategies
- Biomimetics and Design Strategy
- Case Study:
RoboFlies: Biomimetic Micromechanical Flying Robots
Micro/Nano-Robot Control
- Kinematics and Dynamics,
(Teleoperation Based, Task Based and Automatic) Control Approaches, Issues,
Distributed Control, etc.
Literature Review Reports
Project Presentations (20-30 minutes/student)
Guest Speakers:
- Philip LeDuc, MechE/CMU:
Biomolecular motors and soft-lithography
- Tomasz Kowalewski, Chem/CMU:
AFM imaging and synthesis of polymers and carbon nanotubes
- ...
Grading:
Final Project: 50%
Homework: 30%
Literature Review Report: 20%
Some Relevant Textbooks:
- M. Elwenspoek and R. Wiegerink,
Mechanical Microsensors, Springer-Verlag Berlin, 2001.
- J. Israelachvili, Intermolecular
& Surface Forces, Academic Press Ltd., 2nd Edition, 1992.
- M. Scherge and S. Gorb,
Biological Micro- and Nano-tribology: Nature’s Solutions, Springer Verlag,
Berlin Heidelberg, 2001.
- V J Morris, A R Kirby, A
P Gunning, Atomic Force Microscopy for Biologists, London, Imperial
College Press, 1999.
- Dror Sarid, Scanning Probe
Microscopy, Oxford University Press, Revised Edition, 1994.
- S. Fatikow and U. Rembold,
Microsystem Technology and Microrobotics, Springer Verlag, 1997.
- (Ed. by) H.-J. Güntherodt,
D. Anselmetti, and E. Meyer, Forces in Scanning Probe Methods, NASA
Science Series, 1995.
- B. Bhushan, Handbook of
Micro/Nanotribology, CRC Press, 2nd Ed., 1999.
- D. Maugis, Contact, Adhesion
and Rupture of Elastic Solids, Springer Verlag, Berlin, 2000.
- M. Madou, Fundamentals
of Microfabrication, CRC Press, 1997.
- Elwenspoek & Jansen,
Silicon Micromachining
- Ristic, Sensor Technology
and Devices
- Senturia, Microsystem
Design
- Sze, Semiconductor Sensors
- G. T. Kovacs, Micromachined
Transducers Sourcebook, Mc-Graw-Hill Companies Inc., 1998.
- Tai-Ran Hsu, MEMS and
Microsystems Design and Manufacture, McGraw-Hill Inc., 2002.
- ...
Relevant Journals:
Science, Nature, Scientific American, J. of MEMS, J. of Micromechanics and
Microengineering, Nanotechnology, IEEE/ASME Trans. on Mechatronics, IEEE
Trans. on Robotics and Automation, Advanced Robotics, J. of Micromechatronics,
J. of Adhesion Science & Technology, Sensors and Actuators A/B, J. of
Vacuum Science & Technology, Applied Physics Letters, J. of Applied Phys.,
Review of Scientific Instruments, …
Relevant Conference Proceedings:
Proc. of the IEEE Nanotechnology Conference, IEEE International Conference
on Robotics and Automation, IEEE/RSJ International Conference on Intelligent
Robots and Systems, IEEE International Workshop on Micro Electro Mechanical
Systems, Proc. of the SPIE - The International Society for Optical Engineering
(Microrobotics and Microassembly), Proc. of the International Symposium on
Micromechatronics and Human Science, Proc. of the IEEE/ASME International
Conference on Advanced Intelligent Mechatronics, …
HAVE FUN!
Prepared and updated by Metin Sitti, 11/12/02, CMU.