IBM-Bascom Professor - integrated circuit design and processing and design, semiconductor interfaces, optical and micromechanical sensors and systems, mechanical properties of thin films, application of X-ray lithography to sensor fabrication, microactuators, X-ray masks; <A HREF="http://www.engr.wisc.edu/interd/msep/msep.html">Manufacturing Systems Engineering Program</A>; <A HREF="http://www.engr.wisc.edu/interd/msp/">Materials Science Program</A>; <A HREF="http://www.engr.wisc.edu/centers/wcam/">Wisconsin Center for Applied Microelectronics</A><P>
