>>> 'ultek' problem from bob -- Wed Feb  1 15:06:27 1989 <<<

The ultek was inspected and a few modifications are required.
Don Lyons is aware of these.

1. Water flow interlock should be changed to a Proteus type. 
   Current interlock is not working

2. A vacuum interlock must be added to the HV supply. The #1
   killer in fabs is e-guns!! They must be faulted off when the 
   chamber is opened. Ideally this is done with a set point on an 
   ion gaguge controller however lacking this a pressure switch will
   do.

Don is in receipt of a Proteus and interlock switch. He will need 
help installing these.

>>> 'ultek' problem from lyons -- Thu Feb 23 15:11:06 1989 <<<

problem:  no vacuum/water interlock

solution: installed proteus water interlock (supplied by Bob) and
	  26" Hg vacuum interlock (also supplied by Bob).  works
	  ok and the ultek is up.

>>> 'ultek' problem from dianeh -- Fri Jun 23 09:24:46 1989 <<<

The water interlock for the ultek does not seem to be working.  There
seems to be water flowing through the cooling line for the crucible
but the water gauge (located on the back of the rack ) is not spinning.
The water is also starting to become warm.  Also, the high voltage 
switch can be turned on without the water line open.  When the line is
then opened, the high voltage remained on for a minute, then shut off.
I was in the process of depositing titanium on a silicon wafer when the
trouble occurred.  

>>> 'ultek' problem from dianeh -- Fri Jun 23 09:31:19 1989 <<<

For the present, I have shut down the evaporator but have left the ion
pump on.  If you need to reach me, I will be in the lab or I can be
reached at x28897.

>>> 'ultek' problem from bob -- Fri Jun 23 09:49:48 1989 <<<

The water flow on the ultek appears OK and no cause for it faulting
has been determined. I will inspect the loop on the roof to see if
there are any problems.

>>> 'ultek' problem from dianeh -- Wed Jun 28 09:27:58 1989 <<<

This morning, I proceeded to do a titanium evaporation and there was no
power to the filiment.  The pressure in the chamber was low (10-7 range).
I first turned on the cooling water to the crucible, then I turned on
the main power.  I turned on the high voltage then turned the emission
control to about 1.20.  The filiment  did not glow and the current meter
read zero amps.  I waited a minute for the system to warm up, but there was
no change.  I turned off the emission control, the high voltage, and the
main power.  I turned on the main power again and this time, the water
interlock light went on, even though there was water flowing through the
line.  I turned the water on and off, but the water interlock light 
remained on.  I shut the power off and opened the container.  The filiment
was not burned out.  Presently, the system is not pumped down, and all 
of the power is off.  I can be reach in the fab lab or at my office
(x-28897) for any questions.

>>> 'ultek' problem from parrish -- Wed Jun 28 11:39:39 1989 <<<

problem:   filiment not on after all interlock met.

cause:     loose connection at the high voltage input

solution:  Don Loyns tightened up the connection, and system is being pump
           down.

>>> 'ultek' problem from dianeh -- Thu Aug  3 11:24:05 1989 <<<

1.  The ultek is taking a very long time to pump down to an evaporation
pressure  (~5x10-7).  It takes about 24 hours to pump down as compared
to the several hours it used to take.  One of the sublimation pump
filiments is burned out and two others don`t seem to help the pumping
process.  One filiment seems to work but it takes a long time to pump
down.  I think changing the sublimation pump filiments would correct
the problem.  There are extra filiments in the cabinet under the 
evaporation chamber.
 
2.  During a deposition, two small screws fell out of the crucible
holder assembly in the chamber.  When I turn the red knob on the
outside of the chamber used to move the crucible holder assembly, it
gets stuck in the middle.  The Ti and Cu crucibles can be move next 
to the e-beam filiment but the Pd crucible can not.  I have tried to
locate the postion of the screw that fell out but I could not find where
they belong.  The screws are located inside one of the sterile gloves
on the cabinet where the chamber is.

When you replace the filiments, please notify me as I would like to learn
how to replace them.  I am usually in lab or I can be reached at
x2-8897.  Thank you.
Diane

>>> 'ultek' problem from dianeh -- Thu Aug  3 11:36:55 1989 <<<

Continuation of previous problem:
Presently, the ultek is under a low vacuum using the mechanical pump.
There are no wafers in it.
Diane

>>> 'ultek' problem from parrish -- Wed Aug  9 14:03:03 1989 <<<

problem:   slow pumpdown, filiments burnt out

cause:     filiments burn out from heat and time

solution:  removed burnt out filiments, and replaced with new ones.
           system need to be bought up and rechecked.

>>> 'ultek' problem from dianeh -- Mon Sep 18 16:43:17 1989 <<<

There is a crucible boat in the ultek that can hold three metal
sources and this boad is moved by turning the red handle on the
front of the chamber.  The boat can be moved so that the crucible
nearest to the front of the chamber and the middle crucible can
be alined with the e-gun but the boat will not move any further than
the middle crucible.  The far crucible can not be aligned.  When
the red handle is turned too far, it gets stuck.  
The ultek is presently under a partial vacuum using only the roughing
pump.
Thanks
Diane Hoffstetter   (dianeh)

>>> 'ultek' problem from parrish -- Tue Oct 10 14:43:53 1989 <<<

problem:   only the first, and second cricible are aligned with the
           E-gun.

cause:     two of the four alignment screws had falling out

solution:  removed the couling around the gun and adjusted the back screws
           and replaced and aligned the front screws. system is back toget-
           her and ready for use.

>>> 'ultek' problem from dianeh -- Wed Jan 10 10:17:39 1990 <<<

1)  The water cooling lines (the clear tubes) are becoming increasingly
more filled will algae or what ever it is and I am concerned that the
tube will become completely clogged.
2)  After I have the chamber pressure down to 2x10-5 torr, I tried to
turn on the ions pumps.  When I turned on the ions pumps, the pressure
rose to over 1x10-4 torr and the pressure went down after turning them
off.
The power connection from the chamber to the ions pumps looks like it
may be shorting or their may be a short inside the chamber.  I tried
several times to turn the ion pumps on with no success.  

>>> 'ultek' problem from bob -- Thu Jan 11 15:51:28 1990 <<<

Problems with the cooling lines and a possible short in the ion
pumps will be looked into Jan 12. A report on the ultek will be
made at that time. The cooling lines can be replaced quickly
and hopefully the ion pump will be fixed easily. This may
require dumping a high voltage cap into the ion pump to burn
away a short. James Parrish will be looking into this
problem.

>>> 'ultek' problem from bob -- Wed Jan 31 09:09:48 1990 <<<

James Parrish will zap the ion pumps with high voltage to eliminate
a short in these pumps. This will be tried latter this week. Dianeh
has been consulted and this time schedule is acceptable.

>>> 'ultek' problem from bob -- Wed Feb 28 14:30:44 1990 <<<

The ionpumps on the ultek were checked by James Parrish. They are not
shorted and should start.

The cooling lines were cleaned and fresh water will be run through them 
overnoght to kill the algae.

The ultek is considered up until it is tested by Dianeh.

>>> 'ultek' problem from dianeh -- Wed Apr 11 15:16:01 1990 <<<

Two of the sublimation pump filements are burned out and the other
two don't work too well.     They need to be replaced.

>>> 'ultek' problem from parrish -- Tue Apr 17 13:51:44 1990 <<<

system down for modification of the roughing system(installing turbo-pump)
replacing the filiments(2 out of 4 is burned out) also modify the ion gauge
from a conflat flange to a ultra-torr.

>>> 'ultek' fix from bob -- Fri Apr 27 15:43:00 1990 <<<

The ultek is pending modification.
