>>> 'tylan9' problem from bmartin -- Tue Jan  2 08:15:33 1990 <<<

Aborted run during deposition in order to change gas flow rates, but the
residual DCS in the tube apparently reacted with O2 to form a white powder
of SiO2.  The reaction may also have clogged the gas inlet ports.  I will
help in any cleaning of the tube that may be necessary.

>>> 'tylan9' problem from evan -- Tue Jan  2 10:12:24 1990 <<<

The tube was checked and the flow problems are due to an interlock preventing
the NH3 and DCS solenoids from opening. I will report when I have corrected
the problem.  The gas lines are not clogged and the white deposit around the
door flange is normal.

>>> 'tylan9' problem from evan -- Tue Jan  2 17:02:49 1990 <<<

The n2 pump feeds have been restored and the underpressure interlock is normal.
NH3 and DCS will now flow.  The tube still has a high ROR.  I found that the
exhaust bellows has a large amount of flaming white chunks (trapped DCS).
The ROR is most likely due to outgassing of this crud. It will be removed
tomorrow morning.
tylan9 is down for the evening.

>>> 'tylan9' problem from bob -- Thu Jan  4 07:24:11 1990 <<<

tylan9 is down for a change of oil filters. It should be ready for
use latter this morning.

>>> 'tylan9' problem from evan -- Thu Jan  4 11:18:50 1990 <<<

tylan9 is down for the rest of the day for a change of DCS cylinder.

>>> 'tylan9' problem from evan -- Thu Jan  4 14:24:19 1990 <<<

The new cylinder of DCS has been installed.  All filters have been changed
as needed.
tylan9 is up for anything.

>>> 'tylan9' problem from evan -- Wed Jan 10 16:59:26 1990 <<<

problem: DCS and pressure controller appeared to have not come on
cause: problem not quite repeatable...pressure controller worked,DCS
came on but at wrong value (13.5 sccsm vs. 15 sccm request) when I
tried to rerun same program
solution: reseated connectors on gas panel and tried again. program ran
correctly.  I got a change of DCS on the first test run when I jiggled
cables leading me to suspect a connection.  There has been alot of work
in the pump cabinet today which might have disturbed the connections.
tylan9 is up 

>>> 'tylan9' problem from evan -- Fri Jan 12 15:51:14 1990 <<<

the inline filter, manifold and outlet tube have been cleaned. parrish
has changed the oil filters.
leaktest and throughputtest are good.
tylan9 is up for all types of runs.

>>> 'tylan9' problem from rolfe -- Wed Jan 17 13:39:22 1990 <<<

Found bank-3 vacuum wand on the floor.
Also, the wand paddle is loose.

>>> 'tylan9' problem from tom -- Thu Jan 18 13:12:35 1990 <<<

Checked oil pressure after 3 hr. run. Reads 20.5 psi. OK to use.
I think Marilyn changed the vacuum wand tip.

>>> 'tylan9' problem from evan -- Fri Jan 19 10:25:44 1990 <<<

A new (factory recalibrated) MKS baratron has been installed on tylan9.
I will be closely checking it's calibration to see the effect of deposits
on it's plate.  The one that was removed had white powder all around the
fitting so material is getting through the feed tube from the process
chamber.  The throughputs looked good so no manifold cleaning was done
at this time.
tylan9 is up

>>> 'tylan9' problem from evan -- Sat Jan 20 21:10:04 1990 <<<

On restart of NITSTNBY after the power shutdown, the n2 flow was too low
during the idle steps. N2=120 resulted in only a trace of flow( pressure 
below 50 mTorr). I reedited NITSTNBY to N2=180 and flows gave a pressure around
300 mTorr.  This is the second time that the N2 flow has had to be raised.
It is still in the 'noise' level of the MFC.  Old age drift might be the cause
but it is not a problem.  Monitor information only.
tylan9 is up.

>>> 'tylan9' problem from carlos -- Sun Jan 21 17:29:49 1990 <<<

There is no nitrogen flow during the stabilization period

>>> 'tylan9' problem from carlos -- Sun Jan 21 18:06:15 1990 <<<

during the step in which the NH3 alone is turned on, the pressure 
did not increase and stay > 1 mT. The flowmeter may be damaged.
This could also explain the fact that some people has found 
compressive stress in their samples.

>>> 'tylan9' problem from evan -- Mon Jan 22 11:57:04 1990 <<<

problem: low NH3 flow
solution: Found that the new baratron had the zero drift to below -8 mTorr
for base pressure. Reset Zero.
Found that turning on NH3 in manual, the pressure rose too slowly. I found 
that the access hole for the pressure gauge on the door flange was very
clogged. I reamed this out. NH3 now comes right up to expected pressure.
(145 mTorr at 75sccm).  I changed the inline filter and cleaned the outlet
and manifold.  Throughputs look good.
It looks fine now.  It is possible that the incorrect base pressure and slow
responce could have given the results reported by carlos.

tylan9 is up (but watch flows carefully).

>>> 'tylan9' problem from evan -- Mon Jan 22 13:19:20 1990 <<<

The n2 flow during purge and temp stabilizations needs to be N2=180 for
a pressure of around 300 mTorr.  After the power shutdown, NITSTNBY would
not turn on low flow of n2 at N2=120. This drift problem has occurred before.
I remember that originally, N2=100 was used for these steps.  I am not
sure why a power shutdown would alter the MFC but 100 sccm is 2% of full
scale and beyond the noise spec of these MFCs.

RECIPES will need to be edited for N2=180 in order to get the low n2 flow.
I will look into recalibrating the zero of the MFC.

>>> 'tylan9' problem from bob -- Tue Jan 23 14:37:01 1990 <<<

After hyeh makes a 5 hr run on tylan9 this pm, the tube will be
considered down for additional low stress runs until it's
filter are changed in the morning.
tylan9 will remain up for normal runs.

>>> 'tylan9' problem from bob -- Wed Jan 24 11:12:59 1990 <<<

tylan9 is available for low stress runs today and the
filters will be changed at the end of today so low
stress runs can continue. tylan9 is up.

>>> 'tylan9' problem from evan -- Thu Jan 25 09:05:40 1990 <<<

I am changing the oil filters. I am also checking the pressure controller.
It is acting up and may have to be pulled and cleaned.

>>> 'tylan9' problem from evan -- Thu Jan 25 12:00:03 1990 <<<

The oil filters have been changed and the level topped off.
The controller has been checked with MTORR9 and is functioning well.
The throughputs are good.
Tylan9 is up for all recipies.

>>> 'tylan9' problem from bill -- Thu Jan 25 18:49:33 1990 <<<

Pressure alarm sounded during deposition step
( this was clear since the program moved to the predep
  purge, rather than to the backfill )

I notified user ( Bob Ried ) and tried to run the standby
program - but the tube won't pump down at all.

Left tube in ready state, idling at 750 C and atmosphere.

In future, should I try pump restart, rather than leaving at atmosphere ?

>>> 'tylan9' problem from evan -- Thu Jan 25 21:11:57 1990 <<<

Process failed with overtemp alarm. (see previous problem report)
Called into lab and confirmed that tube was flowing n2 and temps were
normal. This will be looked into first thing Friday morning.
tylan9 is down

>>> 'tylan9' problem from ried -- Thu Jan 25 22:18:25 1990 <<<

Tylan9 failed again in the middle of the run.

>>> 'tylan9' problem from ried -- Thu Jan 25 22:38:47 1990 <<<

My previous comment reports the same condition that Bill found.
I noticed in the run that nitrogen did not flow prior to deposition
(the pressure was too low), and that during the run nitrogen flow
was reported even though the nitrogen was supposed to be turned off.

>>> 'tylan9' problem from evan -- Fri Jan 26 16:28:27 1990 <<<

Installed new inline filter elements, cleaned outlet tube and bellows.
Recalibratred N2 MFC.
Recalibrated pressure gauge.
The oil is fresh.
ried's process halted due to low oil pressure in pump. 

tylan9 is up for all processes.

>>> 'tylan9' problem from evan -- Fri Jan 26 17:00:06 1990 <<<

The recipe SNITC.V will not run n2 during temp stab. steps.  The pressure
will stay very low.  I tried to edit the recipe to N2=180 but the tycom
says that the disc is full and aborts the edit session.  It is ok to
run this program.
tylan9 is up for the weekend.

>>> 'tylan9' problem from field -- Fri Jan 26 19:57:33 1990 <<<

Bob Ried's SNITC.V low stress run went into pressure alarm at 19:30.
Mike Judy sent him some e-mail to let him know and I loaded the 
NITSTNBY program and tried to run it - it has aborted itself 
twice now.

>>> 'tylan9' problem from ried -- Fri Jan 26 22:24:36 1990 <<<

Evan, I hope you had a good weekend.  Tylan9 died after roughly 1 hour
of low-stress deposition and needs to be fixed again.

>>> 'tylan9' problem from evan -- Mon Jan 29 09:23:04 1990 <<<

The pump was found off. It was restarted by parrish and is running. 
A set of oil pressure sensors will be added this morning.  Tests will
be performed to determine what is causing the recipe to abort.
.

>>> 'tylan9' problem from parrish -- Mon Jan 29 09:30:06 1990 <<<

update:  the pump was restarted, but the current draw and the insulation
of the sensors will have to preceed the final check out of the system.
system is still down, we will keep everyone informed.

>>> 'tylan9' problem from evan -- Mon Jan 29 11:53:49 1990 <<<

The oil pressure sensors have been installed.  The motor current was checked
and was 3.2 A on legs 1&3, and 3.5 A on leg 2.  This is the same as tylan10
and very close to tylan11 and tylan12 which had readings 0.2 A lower on each
leg.
A test run will be made to see what happens during the SNITC.V process.
tylan9 still down for testing.
>>> 'tylan9' problem from ried -- Mon Jan 29 13:11:20 1990 <<< [No Comment]

>>> 'tylan9' problem from evan -- Mon Jan 29 14:53:54 1990 <<<

NITSTNBY ran over lunch with no problem. I loaded and ran SNITC.V with
18/63 NH3/SiH4 @ 835deg and 300 mTorr.  It temp. stabilized in 45 min and
the process was run for 30 min.  Everything looked very good.  No varience
in oil pressure.  I aborted the program and tylan9 is running NITSTNBY.
Motor current was checked again during the process and was the same.
I can find nothing that might have caused the pump to shut itself off.

The pump failure alarm (located high on the wall between bank2 and bank3,
above galewski's readouts) is active for tylan9 and tylan12.  If it sounds,
please report as a tylans problem immediately and call office if it occurs
during staff hours.

tylan9 is up (watch closely for anything odd and report it)

>>> 'tylan9' problem from field -- Mon Jan 29 23:19:35 1990 <<<

Pressure control doesn't seem to be working quite right.  Asked
for 300 mTorr and got the following:

1 minute into dep                303 mTorr
3 hrs 26 minutes into dep        395-397 mTorr
3 hrs 41 minutes into dep        332-334 mTorr

>>> 'tylan9' problem from evan -- Tue Jan 30 10:01:00 1990 <<<

The pressure control was checked with MTORR9 and worked fine over an hour.
The problem with field's run might be something due to the long DCS flows.
Please report variations during the next runs. Call me immediately if this
occurs during staff hours.

>>> 'tylan9' problem from ried -- Tue Jan 30 12:36:39 1990 <<<

Tylan 9 failed in hard pump of snitc.v (step 65) - no hard pump 
took place.  Pressure was running higher then normal during 
temperature stabilization - around 600 mtorr.
At end of step 65, program jumped to step 105.

>>> 'tylan9' problem from ried -- Tue Jan 30 12:54:44 1990 <<<

After hard pump failure above, load standby without incident.

>>> 'tylan9' problem from evan -- Tue Jan 30 13:36:37 1990 <<<

problem: pressure too high, > 600 mTorr, during temp stbl step.
         no hard pump and failed leak check
cause: ammonium chloride flake on door o-ring
solution: vacumed loose material off door and around inside of tube.
Top layer was a very light fluffy flake layer instead of the usual
hard crust. Possibly a result of long NH3 flow while running MTORR9
this morning.

Re-ran NITSTNBY and pressures were normal. Leak check passed with no
problems.

tylan9 is up

>>> 'tylan9' problem from ried -- Tue Jan 30 22:22:36 1990 <<<

oil should be checked after 13.5 hour total snitc.v

>>> 'tylan9' problem from parrish -- Thu Feb  1 07:26:45 1990 <<<

system down for moderfication of oil filtration system, should be finished
by noon today. all questions should go through bob hamiltom.

>>> 'tylan9' problem from parrish -- Thu Feb  1 12:23:35 1990 <<<

problem:    fluorocarbon coating peeling off inside the prefilter
            canisters.

cause:      reaction of the gases pumped through the pump with the
            fluorocarbon coating.
            prefilter canisters cafiltration

solution:   removed fluorocarbon canisters and replaced with stain-
            less steel canisters. system up as far as the
            modification.            

>>> 'tylan9' problem from evan -- Thu Feb  1 13:45:47 1990 <<<

Basic service performed.  New inline filter, cleaned manifold.
Cleaned the throttle valve.  Performed throughput tests.
tylan9 is up.

>>> 'tylan9' problem from parrish -- Thu Feb  8 11:12:24 1990 <<<

I have checked the oil filtration pressure, and the pressure is 23 psi.
and do not need changing.

>>> 'tylan9' problem from cjkim -- Fri Feb  9 02:33:40 1990 <<<

SNITC 35min.  nanospec 1385A.  No problem.

>>> 'tylan9' problem from evan -- Wed Feb 14 09:47:04 1990 <<<

Problem: no N2 flow during temp stab. step
Solution: edited SNITC.V and changed N2=120 to N2=180.  This fix was delayed due to a full disk.  See previous problem reports for more info.
tylan9 is up and running SNITC.V correctly.

>>> 'tylan9' problem from evan -- Fri Feb 16 09:41:13 1990 <<<

The inline filter has been changed.  Throughputs and leak rate are good.
James has serviced the pump.
tylan9 is up for all processes.

>>> 'tylan9' problem from cjkim -- Sat Feb 17 21:09:02 1990 <<<


SNITC for 38min.  Nanospec reads 1560A.
There was no dummy wafer in the second boat.  I added a couple of
dummies in the second boat.

>>> 'tylan9' problem from galewski -- Tue Feb 20 18:59:30 1990 <<<

Pump shut off at 18:48 during SNITC.V running, enabled by Marilyn.
Notice it had shut off by the pump off alarm sounding.  In back
both yellow and red lights lit.  The filtration unit pressure
gauge is reading 21 - 22 psi.  Do not know if I should restart
and put into standby or not.  Afraid of dagamging the pump so I
will not do anything.  System vented and sitting in idle step.

			-Carl

>>> 'tylan9' problem from parrish -- Wed Feb 21 07:08:10 1990 <<<

problem: pump shut off

cause:   this has happened two or three times, and no evidence of
         any cause has been determined, pump is drawing 3-3.5 amps.
         alone with the other pumps in the system, oil pressure is
         also correct.
solution:restarted the pump, prehaps we could double check the sensors
         the system is up as far as the pump.

>>> 'tylan9' problem from debra -- Wed Feb 21 08:03:07 1990 <<<

Pump stopped during deposition of low stress nitride. Pump has been
checked and restarted.

>>> 'tylan9' problem from evan -- Wed Feb 21 11:47:46 1990 <<<

problem: pump stopped 
cause: unknown.. has happened a few times. the oil level was fine.
solution: replaced the heater coils in the pump motor breaker.  this has
been a source of trouble in the past.
throughputs were checked and found to be ok

tylan9 is up

>>> 'tylan9' problem from tang -- Mon Mar  5 16:10:01 1990 <<<

SNITC for 50 min, target thickness is 1800A.
Deposition pressure was higher than normal, 194 instead of the expected
177. N2 flow was slightly lower, but consistent.

Pressure may need to be looked at.

>>> 'tylan9' problem from evan -- Mon Mar  5 16:45:46 1990 <<<

Changed the KK's in the inline filter.  The oilfilter pressure was 26 psi.

tylan9 is up

>>> 'tylan9' problem from tang -- Tue Mar  6 16:29:39 1990 <<<

Process: SNTIC   dep time requested: 50 min
The Load zone temp. never rises above 795C. It sits at step 55 (temp check)
for over an hour. C & S temps are good, though.

This happened right after the power to bank 3 was shut down this afternoon.

>>> 'tylan9' problem from tang -- Tue Mar  6 17:28:24 1990 <<<

This is a followup to the previous problem report.

I ack'ed tylan9 to the deposition step and recorded the following:

Time	Temp-L	N2	SiH2Cl2	NH3  	Pressure
5min	794.7	28.0	23.2	74.7	185
10min	795.7	28.0	25.2	74.6	191
15min	795.2	30.5	25.2	74.7	193
20min	794.7	29.3	25.2	74.7	195
25min	793.7	28.0	25.2	74.7	197
30min	795.7	28.0	25.2	74.7	198
35min	794.2	29.3	25.2	74.7	199
40min	795.0	29.3	25.2	74.7	199
45min	794.7	29.3	25.2	74.6	200

Temp-C and Temp-S are consistently 800 +/- 0.5C

In addition to Temp-L problem, ror is another problem.

>>> 'tylan9' problem from evan -- Wed Mar  7 09:53:20 1990 <<<

problem: load zone will not reach setpoint
cause: heat plug too close to door
solution: the heat plug was pushed towards the door because it was draging
on the teflon ring at the front of the tube.
The cantelever assy. was raised 1/16" and the cantelever rods were angled
slightly down to bring them to their former position.  The area around
the front flange was scraped clean of Ammonium Chloride deposits so the
o-ring would seat properly in it's new raised position.

tylan9 is up

>>> 'tylan9' problem from evan -- Wed Mar  7 16:54:14 1990 <<<

Pump shut itself off near the end of a long run.  Tom restarted but I will
check the eutectic alloy thermal fuses tomorrow.  The inline filter and
exhaust tube need to be serviced as well.
tylan9 is down for service till noon thurs.

>>> 'tylan9' problem from evan -- Thu Mar  8 12:45:21 1990 <<<

problem: pump shuts off for no known reason
solution: replaced contacts in the pump breaker.  the old ones looked pitted
and burnt.
     cleaned outlet tube and manifold, checked inline filter.
     throughput is good. base pressure = 14 mTorr  ROR = 6 mTorr/min

tylan9 is up

>>> 'tylan9' problem from evan -- Tue Mar 13 14:13:40 1990 <<<

A modification has been added to the n2 MFC of tylan9.  The source gas
can be changed to a optional second gas by setting CCOUT7=ON in the
recipe.  The input is currently attached to AR.  It will be switched to
NEON when a cylinder arrives.  This set-up is for hyeh's experiments.

>>> 'tylan9' problem from debra -- Fri Mar 16 15:54:40 1990 <<<

Tube was accidently vented to atmosphere after reassembly
of bellows and caused the tube to be "dusted" with glass
powder. Cantilevers were vacuumed, and boats replaced.
Two short coating runs were done to "glue" down any
remaining particles. Tylan9 is up.

>>> 'tylan9' problem from weijie -- Sun Mar 18 20:55:42 1990 <<<


SNITC.V is used to deposite low stress nitride. With NH3=16sccm,
DCS=64sccm, and pressure=300mTorr,  a 35 min. deposition should give
1200A nitride.  But measurement from Nanospec prog. 2  gave only
600-700A of nitride.   Something must be wrong, either tylan9 or
nanospec.

>>> 'tylan9' problem from evan -- Tue Mar 20 14:20:38 1990 <<<

The problem is due to different index of refraction of low stress nitride
causing false reading on nanospec.

>>> 'tylan9' problem from debra -- Tue Mar 20 15:26:35 1990 <<<

Last three runs have had gross nonuniformities of film thicknesses
and composition (low stress nitride) within each wafer. Tylan9 is
down until tomorrow when we can investigate this problem.

>>> 'tylan9' problem from evan -- Wed Mar 21 11:26:29 1990 <<<

Vac alarm sounded while SNITCALA was ramping from 800 to 900 C.
It had just completed 800 calibration and had been running fine for 1.5hr.
A crack noise was heard by tom and myself just before the vac alarm.
White smoke was coming out of the cantelever rod containing the tc.

Looks like a broken cantelever.  The tube will be opened after a little
purging to assess the damage.
tylan9 is further down

>>> 'tylan9' problem from evan -- Wed Mar 21 11:43:45 1990 <<<

tylan9 will be down for a complete change of quartzware. 

>>> 'tylan9' problem from evan -- Thu Mar 22 16:54:16 1990 <<<

The quartzware change is progressing.  Tube should be ready for test pump
tomorrow a.m. .If all goes well, tylan9 should be up for the weekend.

>>> 'tylan9' problem from evan -- Fri Mar 23 11:37:06 1990 <<<

The new quartzware has been installed.  Cantelever has been rebuilt, installed
and alligned.  A new drive cable was installed. The exhaust manifold was cleanedand new kurly kates installed.  The tube is firing and under purge. tom
will be checking the calibration. A coating run will be done when cal is 
verified.
tylan9 should be up for the weekend. 

>>> 'tylan9' problem from debra -- Fri Mar 23 16:27:06 1990 <<<

Tylan9 has been coated and is currently being temp. calibrated.
This program may take several hours to finish. When the tube has
been calibrated, the thermocouple must be unplugged before opening
the tube. A test run should be done before actual processing to
determine deposition rate. tylan9 is up for testing. Please
report any test results on the wand.

>>> 'tylan9' problem from judy -- Fri Mar 23 19:48:19 1990 <<<

I inadvertently acked tylan 9 during the calibration run (~7pm).  Upon asking
a few people what to do I aborted the run and reran it.  But, the tube
kept failing the leak test!?  On the fourth try the tube successfully
made it through the leak test and is currently in step 45.  I am sorry
if this completely screws up the calibration run.  I only hope that
simply restarting the program will be adequate.

Sincere Regrets,

Mike 

>>> 'tylan9' problem from mwei -- Sat Mar 24 17:42:05 1990 <<<


Three runs of SNITC.V (low stress nitride, T=835 C, DCS=64, NH3=16)
each failed to pass leak test at step 70 of SNITC.V.

>>> 'tylan9' problem from denlinge -- Sun Mar 25 00:48:02 1990 <<<

It fails the leak test on snitc.v
The pressure gets down to 42mT in step 65 but in step 70 (leak test)
it quickly shot up.

>>> 'tylan9' problem from evan -- Sun Mar 25 11:14:15 1990 <<<

tube will not pump below 35 mTorr and ROR is high.
A check of manifold connections, replacement of outlet tube o-ring,
and tightening cantelever seals had no effect.  It looks like
its in one of the door-cantelever bellows assemblys or tube flange
seals.  I have turned off the heaters so it will be cool for resuming
repair on Monday a.m.

>>> 'tylan9' problem from evan -- Mon Mar 26 16:12:38 1990 <<<

leak in tylan9 was traced to the outlet tube/bellows area and was
repaired.
base pressure is 10 mTorr; ROR < 4 mTorr/min
Quartzware change is now complete.
a 1hr coating run is in progress.

tylan9 is up

>>> 'tylan9' fix from evan -- Fri Apr  6 11:43:19 1990 <<<

The new cylinder of DCS has been installed.
The outlet tube and manifold were cleaned. New KK's were installed in the
inline filter.  The throttle valve was cleaned.
Base pressure = 10 mTorr  ROR = 2 mTorr min.
tylan9 is up

>>> 'tylan9' problem from nam -- Mon Apr  9 11:18:26 1990 <<<

Pressure raised with ~1 mtorr/sec rate.  Aborted my run and loaded 
NITSTNBY and run.  My wafers are still in the tube.  I was afraid
of opening tube without purging the tube.

>>> 'tylan9' problem from nam -- Mon Apr  9 11:57:07 1990 <<<

James checked oil and filter and didn't find any problem.
I restarted my run again with 3 hours and 40 min. deposition time.

>>> 'tylan9' problem from nam -- Mon Apr  9 16:21:52 1990 <<<

Pressure was fluctuating during deposition.

>>> 'tylan9' fix from evan -- Tue Apr 10 11:06:39 1990 <<<

problem: pressure fluctuation
solution: pressure controller was checked with MTORR9 and manually.
Everything looks good.  63/16 DCS/NH3 with throttle open had process
pressure of 185 mTorr.
During base pressure check found jumpy readings.  When relay #1 was
wiggled, pressure jumped erratically.  Removed relay and found signs
of coil overheated.  Replaced relay and pressure readings were much more
stable.
This failing relay could have been cause of erratic pressure readings.

Base pressure, ROR and throughput are all good.

tylan9 is up

>>> 'tylan9' fix from evan -- Thu Apr 12 16:49:10 1990 <<<

Inline filter elements, KK's, were replaced.  Throughput, base pressure, and
ROR are good.
tylan9 is up

>>> 'tylan9' problem from evan -- Fri Apr 13 13:50:22 1990 <<<

Calibration was lost during work on bank3.  SNITCALB was loaded and is
running.  tylan9 can be used when calibration is finished.  Be sure to
remove t/c cables before opening door.

>>> 'tylan9' fix from evan -- Fri Apr 13 16:30:59 1990 <<<

Calibration has been completed.
tylan9 is up

>>> 'tylan9' problem from evan -- Tue Apr 17 08:53:09 1990 <<<

tylan9 will be down all day Thursday for a bank3 repair.

>>> 'tylan9' problem from evan -- Tue Apr 17 09:13:11 1990 <<<

tylan9 will be down all day Wednesday ( not Thursday) for bank3 repair.

>>> 'tylan9' fix from evan -- Wed Apr 18 16:55:49 1990 <<<

work on bank complete for now
tylan9 is up

>>> 'tylan9' fix from evan -- Tue Apr 24 11:52:24 1990 <<<

General maintenance performed.  New bellows/exhaust manifold installed.
New KK's in inline filter.  Outlet tube cleaned.  Oil filters replaced.
Throughput good.  Base pressure 10 mTorr.  ROR = 2 mTorr/min.
tylan9 is up

>>> 'tylan9' fix from tom -- Mon Apr 30 15:34:40 1990 <<<

Calibrated tylan9. It was off a bit from when Evan was working on
the electronics in bank 3.

>>> 'tylan9' fix from evan -- Tue May  1 14:03:00 1990 <<<

A new feature has been added.  When using pressure control (CCOUT6=ON),
the pressure can be read on the TYCOM display in the N2 flow location
in lower right of screen.  The number displayed is 16 mTorr higher than
actual tube pressure.  You must subtract 16 from the readout to get true
pressure. 
The readout still reads N2 flow at all other times.
This is a temporary hookup until a new DEF table is installed which will
have a fulltime pressure channel.

Throughput, base pressure and ROR are all good.

tylan9 is up

>>> 'tylan9' fix from evan -- Thu May  3 15:59:01 1990 <<<

Testing fix header file.  It didn't work.

>>> 'tylan9' fix from evan -- Thu May  3 16:59:15 1990 <<<

2.5hr of SNITC.V, 16/64 at 835deg.  Testing ROR of process pressure.

>>> 'tylan9' fix from parrish -- Fri May 11 13:28:38 1990 <<<

the oil filter elements(prefilter & alumina) has been changed
