>>> 'tylan16' problem from hcc -- Mon Jan 22 14:40:04 1990 <<<

T-C-open problem on tylan16 from hcc (22-jan-1990 14:38)

User Comments:
This is a test.

>>> 'tylan16' problem from evan -- Tue Jan 23 08:56:37 1990 <<<

clearing test message

>>> 'tylan16' problem from bob -- Fri Jan 26 13:39:46 1990 <<<

James Parrish reports a flow fault alarm on tylan16. Evan will
look into this when he returns for the dentist.

>>> 'tylan16' problem from bob -- Fri Jan 26 16:39:42 1990 <<<

tylan16 is operational however it has a problem at high
throughputs maintaing a low set pressure. It's inline
filter will be checked on Monday.

>>> 'tylan16' problem from evan -- Mon Jan 29 09:14:49 1990 <<<

problem: high process pressure alarm
cause: insufficient data
solution: throughputs were checked and were slightly better than just after
the last inline filter change 11/21/89.
I suspect that a process pressure was requested that was too low for the
ammount of SiH4 requested.  The limit for control @ 300 mT. is 100 sccm of SiH4.
A flow of 200 sccm SiH4 will result in a process pressure around 380 with
the throttle wide open.
No other action was taken.
tylan16 is up.

>>> 'tylan16' problem from jiahua -- Thu Feb 15 14:28:19 1990 <<<

tylan16 had high oxygen content reported by Charles Evans, but it hasn't
been tested yet after repairing for a leaking rear connection. Katalin
and Prof. Howe agreed to sand out a sample to test the oxggen contest, so
the boat has to be cleaned to get a typical sample for testing.

>>> 'tylan16' problem from evan -- Thu Feb 15 17:02:51 1990 <<<

the boats have been cleaned.  there are dummy wafers in boxes in front.
tylan16 has not yet been helium leak tested due to hld problems.

>>> 'tylan16' problem from evan -- Fri Feb 16 12:00:59 1990 <<<

The manifold, cantelever, and door have been leaked checked.  the
results were very good.  
tylan16 is ready for the O2 content test runs.

>>> 'tylan16' problem from hcc -- Tue Apr  3 15:40:51 1990 <<<

TYCOM problem on tylan16 from hcc (03-apr-1990 15:24:02)

User Comments:
Tycom doesn't work.

Diagnosed as MCB (microcomputer board) by hcc (03-apr-1990 15:35:58)

Comments from hcc at 03-apr-1990 15:36:42 :
Faulty component in the microcomputer board.
We are ordering the component now.

Comments from hcc at 03-apr-1990 15:39:39 :
We have replaced the faulty component in the board.
TYCOM is working now.
The equipment is up.
