>>> 'tylan11' problem from evan -- Thu Jan  4 09:56:05 1990 <<<

The pump has failed.  tylan11 will be down until parrish returns (he will returnon monday.

>>> 'tylan11' problem from bob -- Thu Jan  4 11:22:18 1990 <<<

The mechanical pump on tylan11 has failed and will require replacing.
tylan11 will be out of service until Wed. Jan 10th due to this problem.

>>> 'tylan11' problem from bob -- Wed Jan 10 15:32:03 1990 <<<

A rebuilt pump was installed in tylan11 and failed to
produce a good vacuum. The reason will be investigated 1st
thing in the morning. tylan11 remains down
*Do Not Operate*

>>> 'tylan11' problem from parrish -- Thu Jan 11 11:54:54 1990 <<<

problem:   roughing-pump making loud noises

cause:     oil filter clogged in the pump

solution:  removed the pump and cleaned inside module, case and oil
           screen. reinstalled pump system is up .

>>> 'tylan11' problem from evan -- Thu Jan 11 12:13:42 1990 <<<

Tylan11 is back together and running an n2 purge. I will check throughputs
at 13:00. It looks very good right now so I expect it to be up at 13:30.

>>> 'tylan11' problem from evan -- Thu Jan 11 13:50:26 1990 <<<

The pump repair has been completed.
Throughput figures are good. Roughly same as pre-pump failure.
Base pressure = 10 mTorr   ROR = 4 mTorr/min.

tylan11 is up

>>> 'tylan11' problem from weijie -- Thu Jan 25 14:50:50 1990 <<<

SDOPOLYG for 2 hr.  The front end of the boat was darken after
the deposition.

>>> 'tylan11' problem from debra -- Thu Jan 25 16:05:12 1990 <<<

The "dark" deposits are common after running SDOPOLYG.

>>> 'tylan11' problem from field -- Fri Jan 26 11:38:28 1990 <<<

The load-end boat has a cracked rail that extends for 4 or 5 wafers
long and the source-end boat has the final few slots (the closest
to the furnace) inaccessible because of the position of the boats
and the shape of the current wand.

I went ahead with my run but maybe one boat needs replacing and
the boats need repositioning and/or the wand needs to be bent.

>>> 'tylan11' problem from carlos -- Fri Jan 26 22:33:19 1990 <<<

The central glass rod that has the slots for the wafers inside 
the source boat is broken. Both boats have too much poly.

>>> 'tylan11' problem from evan -- Tue Jan 30 11:58:32 1990 <<<

Oil pressure sensors have been installed on the tylan11 motor.  The
low oil pressure alarm is now functional.  
In addition, throughput tests were performed and found to be good.
tylan11 is up

>>> 'tylan11' problem from evan -- Tue Jan 30 12:00:18 1990 <<<

Re-entering problem from carlos.  Boat has broken slot piece.

>>> 'tylan11' problem from bill -- Tue Feb  6 23:50:56 1990 <<<

Loaded SUNPOLYA ( had already done a coating run no problem )
loaded my wafers, closed up tube - and then noticed
the firing lights were not firing.

Checked circuit breaker in the back - it had tripped off.
Tried to reset - no problem - breaker reset and remained in on
position, but still no heaters firing.

Called Bob at home ( I hate waking people up ) who suggested
resetting the DTC card.

I tried this, and then reloaded the PLYSTNBY program - 
but still no firing. Switched circuit breaker on/off a few times -
but still dead.

I unloaded my wafers, and left the tube with N2 flowing, in ready mode
( so no pumping ).

Hope the tube survives...

>>> 'tylan11' problem from evan -- Wed Feb  7 14:00:27 1990 <<<

Problem of not firing related to bad amp board in tylan10.
see tylans problems for details.
tylan11 is up

>>> 'tylan11' problem from cjkim -- Fri Feb  9 09:40:20 1990 <<<

SDOPOLYG for 2hr 30min.  Thickness will be reported later.
We are still short of one dummy wafer in second boat.

>>> 'tylan11' problem from judy -- Fri Feb 16 00:04:31 1990 <<<

Is black deposits on the front of the boat normal?  It looks like there
is a lot to me.

>>> 'tylan11' problem from cjkim -- Sun Feb 18 01:10:01 1990 <<<


SDOPOLYG for 2hrs30min.  Pressure was OK.
Nanopec reads 4200A.

>>> 'tylan11' problem from tang -- Mon Feb 26 11:05:38 1990 <<<

The boats and shrouds are in bad shape. 
There is a  lot of black stuff deposited on
the outside of the outer boat and shroud. The slotted rails
in the boat are broken. 

The inner boat is in a better shape, but not a whole lot better.
Users can still use the inner boat. The outer boat and shroud
must be replaced soon.

>>> 'tylan11' problem from tang -- Mon Feb 26 13:57:18 1990 <<<

After a run of SDOPOLYG for 1hr 15min, the boats get dirtier--more
black stuff deposited on the boats and shrouds--not a pretty sight.

>>> 'tylan11' problem from evan -- Mon Feb 26 16:24:08 1990 <<<

Two sets of new boats have been cleaned and installed.  They need to have
a coating run.  Also, three dummy wafers were too thick to fit into the slots
and should be replaced.  Otherwise...
tylan11 is up

>>> 'tylan11' problem from aplee -- Thu Mar  1 23:47:50 1990 <<<

First boat turns partially black after initial coating run, even worse
after my poly1 deposition. Is this normal?

>>> 'tylan11' problem from bob -- Fri Mar  2 09:35:38 1990 <<<

The front of the wafer carriers on tylan11 show a black deposit
after a doped poly run. The reason for this is not fully understood.
It has never caused a problem in the past and the doped poly comes
out excellent in spite of this.
The condition is normal, tylan11 is up.

>>> 'tylan11' problem from tang -- Tue Mar  6 11:50:09 1990 <<<

SUNPOLYA for 3 hr. thickness was 1.8 um, dep pressure was a bit high--333
instead of 310 expected. The resulting film was very cloudy.

[I earlier misinterpreted that the cloudiness was on my PSG. But cloudiness
remains even after stripping PSG.]

Perhaps injector for tylan11 needs to be look at.

>>> 'tylan11' problem from bob -- Tue Mar  6 15:07:44 1990 <<<

recent poly runs show a granular quality. The tube was last replaced
Dec 6th, 1989 and therefore should be in good condition. We will
He leak check the poly tube and clean the boats and baffles tomorow
and report the results.

>>> 'tylan11' problem from debra -- Wed Mar  7 14:17:44 1990 <<<

My doped poly run done on 1000A oxide test wafers came out
cloudy. I'm not sure at this point if it is the poly or
the surface of the test wafers which caused this. I'll
investigate this and report back.

>>> 'tylan11' problem from debra -- Mon Mar 12 13:22:06 1990 <<<

I feel that the cause of the cloudy poly can mostly be attributed
to the surface of my test wafers. Other users have had better
results than I, but still noticed some haze. Let's keep an eye
on it, but in the meantime the furnace is up.

>>> 'tylan11' problem from evan -- Tue Mar 13 14:09:28 1990 <<<

tylan11 and tylan12 are down for a conversion of PH3 to a 50/50 mix
of SiH4 and PH3.  The lines are being pumped out overnight.  Installation
of the new MFC's and gas cylinder will occur Wednesday a.m.

>>> 'tylan11' problem from evan -- Wed Mar 14 14:50:27 1990 <<<

Installation of MFC and cylinder for PH3/SiH4 mix has been completed.
Dabra will be running another test.
tylan11 is up
From voros Fri Mar 16 10:20:07 1990
Return-Path: <voros>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA21056; Fri, 16 Mar 90 10:19:34 PST
Date: Fri, 16 Mar 90 10:19:34 PST
From: voros (Katalin Voros)
Message-Id: <9003161819.AA21056@argon.berkeley.edu.>
To: tylan11
Subject: poly test
Status: R

From: debra@rubidium.berkeley.edu (Debra Hebert)
To: voros@argon
Subject: Doped poly test
Date: Fri, 16 Mar 90 10:00:26 PST

   Katalin, I measured the test wafers done yesterday in
   tylan11 for sheet rho and thickness.I measured the sheet
   resistance on the manual 4 point probe, and the thickness
   on the nanospec (which is not always repeatable for doped
   poly). The results are as follows:

	 Load end:                   Source end:
    sheet rho = 15.2 ohms/sq       sheet rho = 15.8 ohms/sq
    (average of five readings)     (average of five readings)

     thickness = 4813 A            thickness = 4625 A
     (average of five readings)    (average of five readings)
     thickness uniformity =0.4%    thickness uniformity = 0.8%
--------
I have seen the good looking, shiny poly films.
These are excellent results: ~0.7 milliohm-cm, which is standard.

The poly tube is up.
			Katalin


>>> 'tylan11' problem from voros -- Fri Mar 23 10:03:15 1990 <<<

Please avoid using metal tweezers to load wafers into the poly
boats at all times. Metal residues will invariable be left on the
wafers and cause defects in the grown film.

Use the vacuum wands to load wafers into any furnace.

Thank you for your cooperation.

Katalin

>>> 'tylan11' problem from evan -- Mon Apr  2 16:24:58 1990 <<<

The SiH4 is getting very low.  Our new cylinder is due any day.  When
the change takes place, a new size excess flow shutoff valve will be
installed on the SiH4 and SiH4/Ph3 mix lines.  The tube will be down
for overnight pumping and full day of purge/installation of parts.
Shutdown time will be announced later this week.

>>> 'tylan11' problem from evan -- Tue Apr  3 16:57:36 1990 <<<

tylan11,12 and 16 are out of service until 17:00 wednesday for a change
of SiH4 and addition of excess flow valves on SiH4 and Ph3 lines.

>>> 'tylan11' problem from evan -- Wed Apr  4 16:55:24 1990 <<<

New silane was installed.  The baratron readout was very high...90mTorr
for base pressure.  A check with another gauge showed the tube was actually
at it's normal 10mTorr base pressure.  Baratron was reset and voltages
to gauge recorded.  the +15 supply was at +14.14vdc which might be the
cause of the big drift.  This will be checked if the gauge jumps again.
tylan11 is up

>>> 'tylan11' problem from carlos -- Thu Apr 12 11:32:33 1990 <<<

SDOPOLYG, Tdep = 4hrs, 30 min. The nanospec indicates ~0.98um.
I had to run this program 4 times. The first 3 times it asborted 
because it could not pass the leak test. In the last one, I cleaned 
the O-ring with a paper towel, and it finally passed the leak ckeck.
Most likely, it needs a more thorough clean. 
Also, I noticed during pumpdown, the pressure reaches  -50mT ????

>>> 'tylan11' fix from evan -- Thu Apr 12 15:59:04 1990 <<<

problem: erratic base pressure
cause: bulb in auto/manual switch
solution: I recently added new lamps to the gas panel switches.
For some unknown reason, the lighting of this lamp alters the voltages
to the baratron and shifts the reading by 50-60 mTorr.  I removed the
lamp and everything works fine.

I took this oppurtunity to calibrate the n2 MFC.

base pressure, ROR, and throughput are all good.
tylan11 is up

>>> 'tylan11' problem from evan -- Tue Apr 17 08:54:03 1990 <<<

tylan11 will be down all day Thursday for a bank3 repair.

>>> 'tylan11' problem from evan -- Tue Apr 17 09:14:25 1990 <<<

tylan11 will be down all day Wednesday (not Thursday) for a bank3 repair.

>>> 'tylan11' fix from evan -- Wed Apr 18 16:53:22 1990 <<<

work on bank3 complete for now
tylan11 is up

>>> 'tylan11' problem from nam -- Thu May  3 13:16:50 1990 <<<

Deposition pressure is a little bit higher than recommended by the
activation message, it was 367 mtorr.
 
Ran SDOPOLYG with 1 hr deposition time.

>>> 'tylan11' fix from evan -- Tue May  8 09:48:46 1990 <<<

problem: SDOPOLYG process pressure at 367 mTorr
solution: replaced KK's in inline filter (normal maintenance).
throughput is improved by 30 mTorr.

tylan11 is up

>>> 'tylan11' problem from aplee -- Wed May  9 21:40:11 1990 <<<

Poly particles keep sparking all over the place, including the clean
wafers that were about to go in and my clean room gown. This will
contaminate and ruin the poly layers deposited, I think. My guess
is the poly layer on the tube is too thick and needs to be cleaned.
