>>> 'tylan10' problem from evan -- Thu Jan  4 11:19:38 1990 <<<

tylan10 is down for the day for a change of DCS cylinder.

>>> 'tylan10' problem from evan -- Thu Jan  4 14:25:46 1990 <<<

A new cylinder of DCS has been installed.
tylan10 is up.

>>> 'tylan10' problem from galewski -- Mon Jan 15 16:53:29 1990 <<<

Had a lot of problems with the o-ring of the gate valve rolling out
of the groove and not sealing.

Pulled gate valve twice.  Second time I tried a black viton o-ring
and put a little grease on inside circumference (hoping it will make
o-ring stick to groove better).  Hard to put on without twisting the
o-ring.  Is there a tool?  Special o-ring?  Trick?  Would be nice to
find out.  Maybe from the manufacturer.  

Cycled the gate valve 100 times before installation the second time
without the o-ring rolling out.  Has worked once in the system now.
Maybe ok for a while but the above information would be nice for next
time.

			Thanks,
			 Carl

>>> 'tylan10' problem from bob -- Tue Jan 16 10:43:06 1990 <<<

The new gate valve on tylan10 has been problematic since
its install. Carl has serviced it. If problems continue
a retrun to the vendor will be made and a replacement will
be sought. Similar gate valves in tylan's 9-11 work well.

>>> 'tylan10' problem from evan -- Tue Jan 30 14:51:43 1990 <<<

Oil pressure sensors have been added to the pump and connected to the
bank3 warning light system. If pressure drops to 6 psi, the yellow lamp
will light. If pressure continues to drop to below 4.5 psi, the red lamp
will light, the pump breaker will trip and the vlsi area buzzer will sound.

>>> 'tylan10' problem from galewski -- Thu Feb  1 20:08:13 1990 <<<

Tube is not firing, reading erratic temperatures on TYCOM, L,G,H
labels not making sense.  Have seen this behaviour in the  past
and due to DTC board.  Do we have a fixed one in stock?  If so
can we please put it in?  Will check in on this tomorrow.  But,
if changing the board fixes it the procedure to get it started
is as follows:

1) Load and run DTCSET  
2) Load and run KMSET (use recipe from galewski #2)
3) Load and run MANCAL at 500/525/500

				-Carl
 

>>> 'tylan10' problem from evan -- Fri Feb  2 12:03:27 1990 <<<

Swapped DTC card, then firing board, and then CPU and still have no firing.
Will get together with galewski this afternoon.

>>> 'tylan10' problem from evan -- Fri Feb  2 17:47:18 1990 <<<

spare board replacement did nothing
tube started heating up on its own, no firing indicators.
turned off breaker and pulled firing board out
very big mystery

>>> 'tylan10' problem from evan -- Mon Feb  5 16:29:32 1990 <<<

Replaced firing board and turned on breaker.  Ran EPISTNBY (which had been
loaded from Friday)and tube started firing.  I then tried loading DTCSET and
when I ran it, no firing.  I could not get anything else to fire. (20 tries).
I have returned everything to where it was Friday (firing board out, EPISTNBY
in ready) to see if it fires up tomorrow.  
I also noticed that there was a considerable delay for the T/C's to start
climbing and they continued to climb for 30 min.  I think the phantom rise
on Friday was due to the board firing but me not noticing because I was in
a panic as soon as I noticed that tylan11 had stopped firing after a circuit
card switch. 
It looks like the problem is related to the loading of programs but still
no idea where or how.

>>> 'tylan10' problem from evan -- Wed Feb  7 14:02:01 1990 <<<

Discovered that the amp board power supply was loading.  replaced the amp
board and reset everything.  recipies loaded ok and tube is firing.
ran DTCSET, KMSET, EPISTNBY, and now going to load MANCAL.
tylan10 is up

>>> 'tylan10' problem from galewski -- Tue Feb 13 17:30:42 1990 <<<

The o-ring has jumped out of the groove again on the gatevalve
since it will not shut.  Not critical during the calibration
which I am doing now, but will have to fix in the next couple
of days so it does not delay starting the expts.  Maybe this
time James can help me?  He seems to have a better touch than
me since he has not encountered the same problem with the other
tubes.  Or maybe I am using the wrong o-ring size?

			-Carl

>>> 'tylan10' problem from galewski -- Thu Feb 15 20:14:49 1990 <<<

O-ring that we installed this afternoon jumped out of the groove
after only three cycles when installed in to the system.

Tried again tonight, this time using grease in the groove to 
hopefully stick the o-ring better.  Also used a black viton
o-ring, and cycled the valve many, many times before installing.
Works in the system for the moment.  Will see tomorrow.

When trying to find the popped out o-ring that had slipped down
towards the pump I noticed the inlet screen looking full of brown
powder.  Took the liberty of putting in a clean one I saw on James
cart.  The one I took out is in a glove on the cart.  Hope that
was ok?

			-Carl

>>> 'tylan10' problem from galewski -- Fri Feb 16 19:46:03 1990 <<<

esCooling system shut off heater and went into backup because of
fuse blowing for power to status panel.  Will go into longer
anaylsis when I get back to the office and some food.

			-Carl

>>> 'tylan10' problem from galewski -- Fri Feb 16 20:42:35 1990 <<<

Ok this is what I know.

Fuse blew because outlet Phil wired for me on the back of the
chiller was putting out 197 volts.  It is wired with half of
the 204 that the chiller is using and with the ground as return.
The return and ground tied together with a screw, no starwashers.
I thought that there maybe was some resistance so I put a couple 
of starwahers in.

Also thought that maybe the leakdector had done something, since
Bob and I smelled a strong smell of something burned around it.
BY THE WAY, I have asked before that the leak detector not be 
plugged in where it was since has popped breakers on that circuit
before.  PLEASE plug it in where it is now, that circuit is almost
unused.  (Bob I think that maybe the smell inside the gas cabinet was
probably drawn into it by the exhaust.)  Bob and I thought maybe the 
heatere tape on the DCS was doing something but after checking it,
it seem to work ok.  Just does not get very hot.

Plugged chiller in and got 118V.  I restarted chiller and
then found that valves would not close.  The oultet was now only 
putting out 68V.  Then I disconnected the valves but left the 
status panel plugged in and got 98V.

Got frustrated and worried so I connected the status panel and 
valves to the outlet by the chiller.  Can run the system like 
that but not as protected as if running of the same power as 
the chiller.

Then when I tried to reset the firing board the SCR overtemp
alarm would not reset when turning off the power to the firing
board.  Took board out and checked relay K3 but ok.  Put board
back in and now works again.

Conclusion: I might be in business for the weekend if the gate
	    valve continuous to work and the power to the chiller
	    does not act up.  Problem with circuit seems to be
	    something related to the common (=ground) for the chiller.
	    The chiller does not notice since it is running off
	    the two hots but the power to the status panel and
	    valves is affected.

			-Carl

Ps.  I am leaving the recipe loaded in a wait step and will run 
     it tomorrow if everything looks ok then.  I am not running 
     the tube unenabled.

>>> 'tylan10' problem from galewski -- Sat Feb 17 17:14:07 1990 <<<

Had problems with MFS 460 saying that I had leaks for DCS and H2.
Would not improve with going through a power off autozero.  Was 
able to improve zero on H2 with pot accesible through hole in
cover.  Nice feature.  For DCS, however, there is no hole as
Evan discovered before.  When I took off the cover there is what
looks from the instruction manual to be an autozero board which
should be present if it was a UFC-1500.  Thought I bought a UFC
1400 without the autozero because I did not want it to fight
with the MFS 460 autozero.  This would agree with there not
being a hole for the zero pot.  The pot under the cover says
"do not adjust".  Did you adjust when we had this problem
before Evan?  Well the output reads -84mV and bounces around
+-10 when idle.  The MFS 460 and it seem to agree after a
couple of rezeroings.  I will keep my fingers crossed.

BY THE WAY, I would have been dead in the water if I had not
been able to get at a good multimeter, but fortunatly the
yellow one was in the tech room.  Can that be its resting
place for a while?  Only until I do not have to do this any-
more.

			-Carl

PS. Maybe the Unit DCS MFC was misslabeled?  S/N is C15-7751 TSV.

>>> 'tylan10' problem from galewski -- Sat Feb 17 17:37:58 1990 <<<

Sorry, had leads reversed.  The "zero" output from the DCS MFC is
+84mV.  Not really the zero the autozero feature is to provide.
Or maybe instead of misslabeled, it is a 1400 but with a 1500 case?
All very confusing, but if it will only work for a few runs this
weekend I am happy.

			-Carl

>>> 'tylan10' problem from galewski -- Sat Feb 17 23:01:32 1990 <<<

Still have to problem with the DCS mfc.  Tweaked it down from 84mv
to 4mv while idle.  Noticed the race between the MFS 460 to think
it found its zero before the mfc did.  Maybe better to reset the
460 completely so it takes much longer to zero from scratch.  Well
anyway the mfc read about 8mv by the time the 460 zeroed itself.
Should give more margin since the DCS leak error occurs when the
DCS mfc get to above about 90mv or so (did not catch it in the act).
Will keep on trying.

			-Carl

>>> 'tylan10' problem from galewski -- Tue Feb 20 00:27:07 1990 <<<


After observing the output of the DCS mfc for several runs with the
multimeter I think I know why it kept giving DCS leak alarms during
the hydrogen cooldown after deposition.  After the depostion using
DCS the output stays elevated by about 20mV until the switch to 
nitrogen.  The sensor responds to the pressure surges in the system
since the flow controlling valve is on the other side.  Well anyway
with the "zero" output at 86mv the additional 20mv got over the
100mV limit which means that there should be flow, and the 460
alarmed.  I still do not understand why the mfc has what looks like
a autozero board.  Also do not understand the dcs indication on
the MFS 460 showing 0.0 +- 0.1, when the mfc output is rock steady
at 4mV.  Is the 460 noisy by itself, at least it does not seem to
alarm on its own noise.

				-Carl

>>> 'tylan10' problem from galewski -- Tue Feb 20 00:34:49 1990 <<<

BY THE WAY, I am only reporting all this for information purposes
right now.  Still getting succesfull expts. so want to leave every-
thing alone for the moment.  Do not want to disturb the good karma
which seems to have settled on the system.  I just hope it lasts
a few more days.

				-Carl
From phillip Fri Feb 23 09:40:06 1990
To: /micro/micro/labroot/cmnts/tylan10-p

P: Tylan tube10 ancillary equipment malfunctioning.
S: Tracing circuit revealed the 117Vac feed into a
   common junction box had a grounded neutral lead.
   Repaired ground and had Carl reset the cooling
   system.

(The parts necessary to provide a neutral conductor
 for the tylan10 chiller are now on order.)


>>> 'tylan10' problem from phillip -- Tue Feb 27 14:30:03 1990 <<<

The chiller for this system is DOWN. The tube is on city water
back-up for cooling. This will all be reassembled 2/28/90.

( The problem with the voltage on the neutral phase on the panel
 feeding this system is still there. This will also be worked on
 2/28/90 starting @ 6:15am.)

>>> 'tylan10' problem from evan -- Wed Feb 28 15:33:24 1990 <<<

tylan10 chiller is down during electrical repairs.  Loaded and running
EPIVAC per galewski's instructions.  The purpose is to make sure the tube
is cool during long durations of city h2o backup cooling.

>>> 'tylan10' problem from evan -- Fri Mar 16 11:56:12 1990 <<<

Replaced 50 micron city h2o filter on chiller system.

firing breaker reset after auto shutdown on low h2o pressure alarm

tylan10 is up

>>> 'tylan10' problem from evan -- Fri Apr 13 13:52:55 1990 <<<

Calibration was lost during work on bank3.  KMSET and DTCSET have been run.
MANCAL is running at 500,525,500.  Calibration will continue at the other
temps.
tylan10 is down until calibration is complete.

>>> 'tylan10' problem from evan -- Fri Apr 13 16:57:09 1990 <<<

Calibration complete at 500/525/500.
Calibration started at 1040/1075/1040 but stopped for the weekend.
Will be continued on Monday.

>>> 'tylan10' problem from evan -- Mon Apr 16 14:13:52 1990 <<<

Calibration complete for 500/525/500, 1040/1075/1040, and 980/1000/970.
880/900/880 is running now. Calibration should be complete tomorrow pm.

>>> 'tylan10' problem from evan -- Tue Apr 17 09:17:07 1990 <<<

tylan10 will be down all day Wednesday for bank3 repair.  Calibration
continues today.

>>> 'tylan10' fix from evan -- Wed Apr 18 16:57:00 1990 <<<

work on bank3 complete for now.
calibration will be completed Thursday

>>> 'tylan10' problem from galewski -- Tue Apr 24 08:42:16 1990 <<<

Just logged in a checked the status on Tylan 10.  (Cannot help it.)
Anyway, I noted that the pressure in standby seems a little high.
Is reading about 935 on the Tycom.  Should be about 776 on the Tycom
according to my note book (9/9/89).  Maybe good to check the that the 
pump is ok.  Could also be the butterfly valve not fully open. The
N2 MFC can also be out of wack.  Has been in there for a long time
(several years) without any attention.

		Just trying to help,
			Carl

>>> 'tylan10' problem from nam -- Thu Apr 26 12:12:14 1990 <<<

Alarm went off with red "OT" light on.
I pushed alm ack, but it didn't work.  Pushing alarm cancel made the
alarm silence.  
I don't know who was using the tube, but he(she) has to take care of 
wafers as soon as possible.

>>> 'tylan10' problem from jlou -- Thu Apr 26 16:22:52 1990 <<<

This morning I did a high T dummy run to bake the whole reactor.
I found the temperature drift was induced by a loose contact.
I already fixed it. Now the temperature readout is stable.
Tylan10 is up.
