>>> 'randex' problem from rnorman -- Wed Jan  3 07:05:36 1990 <<<

Problem: Large pressure rise in cryo when chamber is vented, temperature
         increases.

Cause: The gate valve had some particle(s) across seal.

Solution: Opened and closed gate valve 2 or 3 times, in hope to
          dislodge particles on seal.  The chamber was vented and
          a small increase in the cryo pressure was observed, to
          5x10-6 on the ion gauge.  This is acceptable for this 
          system.  The next time the cryo is regenerated the gate
          valve seal will be wiped clean.  The randex is up for use.

>>> 'randex' problem from kim -- Thu Jan 18 13:16:53 1990 <<<

Problem:  There is a burning smell in the power supply.  When
          the power ramp up to 400 watts, it dropped down to
          200 watts very quickly and can't ramp up to 400 watts
          any more.  R. Norman will look into it.

>>> 'randex' problem from rnorman -- Thu Jan 18 14:58:02 1990 <<<

The RF supply is not operating correctly.  The randex is down at this
time.  Tomorrow I will further check out the supply.

>>> 'randex' problem from rnorman -- Fri Jan 19 08:56:00 1990 <<<

Problem: RF Power Supply has a funny smell.

Solution: Yesterday I did smell something funny, but today I ran the
         RF supply up to 800 watts into a dummy load and no problem
         or smell ocurred.  The supply must have just heated up
         yesterday.  The randex is up.

>>> 'randex' problem from bob -- Mon Jan 22 07:20:55 1990 <<<

The belts on the randex mechanical pump were replaced as they
were badly worn. The cryopump was regenerated and the randex is 
up.

>>> 'randex' problem from rnorman -- Fri Feb 16 06:32:44 1990 <<<

Randex not pumping down below 2x10-6, looks like a vacuum leak.

>>> 'randex' problem from rnorman -- Fri Feb 16 09:10:55 1990 <<<

The cryo is being regenerated and should be up for use by 11AM.

>>> 'randex' problem from rnorman -- Fri Feb 16 11:32:13 1990 <<<

The cryo was regenerated and is now chilling down.  Target 2 was
changed to Al and target 3  was changed to SiN.

>>> 'randex' problem from rnorman -- Wed Feb 21 13:52:38 1990 <<<

Problem: Vacuum leak in chamber a 2x10-6.

Solution: Two leaks were found one at a view port, the o-ring was 
          replaced; and the other at the leak check port, the 
          Rad lab fitting was removed and blanked off.  The leak
          check valve has a bad bellow and will be repaired by
          parrish.  The base pressure at this time is 5x10-7.
          The randex is up.

>>> 'randex' problem from dchin -- Sun Mar 11 16:06:36 1990 <<<

It took many tries to lower the hoist. Once it was lowering, it was
coming down at higher rate than used to be. It almost slammed onto the
chamber base.

David

>>> 'randex' problem from rnorman -- Mon Mar 12 12:58:30 1990 <<<

Problem: Hoist raises slowly and when lowering it first hesitates
         then accelerates as it moves down, hitting the chamber a
         little hard.

Cause: The hoist bushing was gummed up and sticking, causing a
       hesitation effect at first.   Also, the taurus solenoid
       to the air line was a little clogged and limiting the air
       flow.

Solution: The hoist bushing was cleaned and lubricated; also, the
        solenoid was removed from the air line and a new taurus
        solenoid was installed on the vent, just before the vent
        valve.  The hoist was tested and the randex is up.

>>> 'randex' problem from denlinge -- Tue Mar 27 17:58:01 1990 <<<

Water was dripping from the left water knob very slowly- about
1 drop every several minutes.  I don't know if this is important or not.

>>> 'randex' problem from rnorman -- Thu Mar 29 13:33:18 1990 <<<

Problem: The left water knob was leaking water.

Solution: The compression nut was tightened down. No
          leak was then noticed.  Randex is up.

>>> 'randex' problem from denlinge -- Sun Apr  1 11:23:02 1990 <<<

The were lead to the hot plate broke right at the connector to the plate.
Needs to be reattached.

>>> 'randex' problem from rnorman -- Tue Apr  3 07:19:35 1990 <<<

Problem: Hot plate voltage wire broken off from connector.

Solution: Two new voltage connectors were attached to the 
          lead wires and firmly connected to the hot plate.
          The randex is up.

>>> 'randex' problem from parrish -- Thu Apr  5 15:00:09 1990 <<<

problem:    system need regenerating

cause:       cryo-temp to high

solution:    regenerated system should be ready for use by 5:00pm today

>>> 'randex' problem from rnorman -- Fri Apr  6 13:39:35 1990 <<<

The cryo pressure was not getting below 2x10-6, so it is being
regenerated.

>>> 'randex' problem from hebert -- Fri Apr  6 14:57:17 1990 <<<

The cryo pump is very noisy as it is cooling down after regen.
The temp is 223 deg K. I turned off the compressor to let the
pump warm up. Sometimes this helps reduce/eliminate ratcheting.

>>> 'randex' fix from rnorman -- Mon Apr  9 06:43:58 1990 <<<

The randex compressor will be turned on, it should have been turned
on over the weekend and reported up.

>>> 'randex' problem from rnorman -- Mon Apr  9 06:45:42 1990 <<<

The randex cryo will be regenerated and turned on.

>>> 'randex' fix from rnorman -- Mon Apr  9 06:55:14 1990 <<<

Problem: Cryo making noise, so compressor was turned off.

Solution: The compressor was turned back on by someone and
        it was not reported up.  Any way, the cryo is chilled
        down and the randex is up.

>>> 'randex' problem from rnorman -- Tue Apr 10 14:55:53 1990 <<<

The randex is down for a chamber clean.  It will take 1-2 more days
to finish cleaning, re-assembly and leak checking.  DO NOT USE!
Please send me target requests to be installed when done.

>>> 'randex' problem from rnorman -- Wed Apr 11 14:56:01 1990 <<<

The randex has been disassembled and cleaned.  Tomorrow I will 
do some minor cleaning and then reassemble.  IT may be up
by Friday morning.  DO NOT OPERATE.
.

>>> 'randex' problem from rnorman -- Thu Apr 12 14:49:37 1990 <<<

Tomorrow I will continue to assemble the system and then leak
check.  DO NOT OPERATE.

>>> 'randex' fix from rnorman -- Fri Apr 13 14:45:32 1990 <<<

Problem: Chamber clean.

Solution:  The chamber was totally disassembled and cleaned thoroughly;
         bead blasted chamber walls and other small parts, sanded down
         top and bottom plates.  All o-rings in the chamber assembly
         was replaced:

         top chamber o-ring, 2-473; bottom chamber o-ring, 2-472
        -J-arm upper seal to atms, 2-337; inner ceramic 2-110&2-116
        -Shutter feedthru, 2-026; T.C. Feedthru, 2-122; view ports, 2-229;
         all 6 blank-offs, 2-216.

         The chamber was leak checked and is leak tight.  Al, Ti and Pt
         was re-installed.  The cryo was regenerated and is chilling down
         at this time.  The randex should be up for use by tonight if
         no problem occurs with the cryo chilling down.

>>> 'randex' problem from rnorman -- Mon Apr 16 08:09:36 1990 <<<

The cryo has a thermal short at the top.  It will have to
be pulled and checked out.  The randex is down.

>>> 'randex' problem from rnorman -- Mon Apr 16 13:06:28 1990 <<<

The cryo was pulled out, turned upside down(to remove anything that 
could cause a thermal short) and then capped off and chilled down;
outside the randex.  The same problem resulted, the upper 1/4 got
frosted up.  Parrish called CTI and gave us a couple suggestions,
one being we have a vacuum leak in the cryo and another the inner
array is bad.  I will leak check the cryo for a vacuum leak, if no
leak is found the inner array may need changed out, parrish says
they cost about $500.   The randex is down.

>>> 'randex' problem from parrish -- Tue Apr 17 09:09:48 1990 <<<

update:   The randex cryo-pump is being replaed with a spare pump
          cleaning and installing will proberly take the rest of the
          day.

>>> 'randex' problem from rnorman -- Tue Apr 17 14:41:14 1990 <<<

The other cryo was installed and chilled down fine.  When the 
chamber was vented the cryo dumped, due to a leak across the 
hi-vac valve.  The cryo was vented up and the gate valve cleaned
from the chamber side.  The cryo is now regenerating and will be
chilled down in the morning.  DO NOT OPERATE.

>>> 'randex' fix from rnorman -- Wed Apr 18 10:35:00 1990 <<<

Problem: Cryo dumped after venting chamber.

Cause: Leak across the gate valve o-ring.

Solution: The gate valve was removed and all sealing o-rings
         replaced, see comments for o-ring numbers.
         The cryo was regenerated and is now chilling 
         down.  It should be up for use by 12 noon.

>>> 'randex' problem from bmartin -- Wed Apr 18 18:01:21 1990 <<<

The deposition of Ti and Pt was fine.  The chamber pumped down to below
6 x 10-7.  After venting system to remove wafer, the O-ring for the lid
came out of its groove.  Although I reseated the O-ring, the chamber would
not pump down below 100 torr.  I believe the leak at the O-ring can be
fixed easily using vacuum grease and/or a new O-ring, but I'll let
Robert handle this task.  By the way, I'm finished with the Ti and Pt
targets for now.

>>> 'randex' fix from rnorman -- Thu Apr 19 07:44:10 1990 <<<

Problem: Not pumping down below 100 torr.

Cause: Chamber o-ring not fully in o-ring groove.

Solution: The o-ring was removed, clean, and re-greased.  The Cu
          target was also installed at #3.  The base pressure of the cryo was
          1.8x10-7, inside the cryo, with a temperature of 12-13~K.  The randex
          is up for use. 

Note: When ever a vacuum system can not pump below 1 torr, especially
      if it can't go below 100 torr,  don't leave it roughing all night.
      Stop the system from pumping by pushing the stop button, or in this
      case the "Vacuum" pump button.  It is better on the pumping unit.
~
     

>>> 'randex' problem from guochun -- Fri Apr 20 01:45:20 1990 <<<

When RF power is applied to target 3. Target 1 is also ignited (at about 115W), after that happened, I reduced the RF power.  Plasma at target 1 disapear at around 90 W.  I did the similar experiment to target 1, no similar problem occurs.
But when I apply RF to target 2. Both 1 and 3 are weekly ignited.  The copper
film I got is not as shiny as what I got last month.  Also, it seems there is
some leaks in the Ar line.  I pumped the line for about 45 mins. The pressure
is 5x10-6.  The cryo pump works VERY well.  Base pressure  as low as 4x10-7
can be reached within one hour.
guochun

>>> 'randex' fix from rnorman -- Fri Apr 20 07:30:09 1990 <<<

Problem: RF leakage from one target to the other and cloudy wafers.

Cause: The RF leakage may have been caused by low conductance between
       the RF selector switch and the pins for each target.  A leak
       in the Ar gas line may have contributed to the cloudy wafers,
       among other factors.

Solution: The contacts on the RF target select switch were cleaned and
         the poly line was removed and a SST gas line was installed from
         the Ar bottle to the MFC valve.  The SST line is pumping out.
         Base pressure this morning was 2x10-7 before pumping on the new gas
         line.  Let me know how it turns out.  The randex is up.

>>> 'randex' problem from hebert -- Fri Apr 20 08:23:47 1990 <<<

Problem: Plasma at target 2 when source select is target 3.

Analysis: The RF source select switch was checked for leakage
between different targets. The breakdown voltage (using Hi Pot
tester) was greater than 4 kV. The switch appears to be good.

Each target was Hi Potted between anode and cathode. Each target
is shorted at 200 to 300 V DC. When the target cooling water was
drained from the target, the breakdown voltage between anode and
cathode is about 3 kV DC.

The targets are connected in series and are on the same circuit as the
cooling water for the RF power supply. Target #2 is the first target
that gets cooling water after the cooling water exits the RF power
supply. This could explain why Target #2 has plasma on it when
the source select switch is at Target #3. 

The cooling water conductivity is too great. It causes RF power
to be shared between targets and/or ignition at the wrong target.
This can cause multiple films to be deposited unintentionally
as the substrate rotates to the station where deposition is 
intended. 

The Randex needs either a closed loop cooling water system OR
a resin bed set-up as is being used on TOPGUN.

>>> 'randex' problem from rnorman -- Fri Apr 20 14:25:53 1990 <<<

The water causes some RF leakage between the targets, especially at
higher powers.  Monday we will look into a solution to this problem.
Use the randex with your own judgement until then.

>>> 'randex' fix from bob -- Fri Apr 27 08:57:23 1990 <<<

liang reported a leak on the water fitting of target2. This
report occurred late in the day and he was given verbal permission
to tighten it enough to stop this leak.

RE: Unselected target discharges.

Low resisistivity of the recirc cooling water is suspect in causing 
unselected targets to have a discharge. A shunt loop with a 
resistivity monitor and a 10 MB/resin cartridge were added to the 
main recirc loop to increase the resistivity of the Microlab loop.

Resistivity has been increased from 17K Ohms to 400K Ohms. The
randex will be monitored for results. This should eliminate
any spurious discharges. Users are asked to report their observations
during this trial period.

>>> 'randex' fix from rnorman -- Fri Apr 27 14:29:23 1990 <<<

Problem: User reported process N2 flows not correct.

Cause: The N2 regulator was not set correctly, was at 10psi.

Solution: Increased N2 pressure to 20 psi.  Randex is up.

>>> 'randex' problem from hebert -- Thu May 10 09:43:39 1990 <<<

Target #1 has plasma even though power is directed to target #3 (Cu).

>>> 'randex' fix from rnorman -- Thu May 10 14:55:55 1990 <<<

I connected a couple ground leads to targets 2 & 3 for hebert.  He
will test the Cu to see if this will temporarily fix the plasma problems.
He his report his findings.

NOTE: Please disconnect the leads when done with target 1.
,

>>> 'randex' problem from hebert -- Fri May 11 08:07:37 1990 <<<

The water lines to target #1 and target #2 have been removed.
Water is flowing only thru target #3. There was still plasma on
target #2. Then the RF power lines to target #1 and target #2 were
removed. There is only plasma at target #3 now. A "popping" sound
was heard when trying to ignite the plasma at target #3. RNorman
observed arcing between the cathode and anode at target #3 when the
popping sound occurred. The insulators that isolate the target from
ground seem to be leaky and should be cleaned.

>>> 'randex' problem from hebert -- Fri May 11 09:20:19 1990 <<<

The RF power supply went to "stand by" several times while trying to
ignite plasma at target #3. Now neither the "stand by" or "power"
lights are ON. I reset the circuit breaker and waited several minutes,
but the supply still doesn't have any output power.

>>> 'randex' problem from rnorman -- Fri May 11 09:07:43 1990 <<<

WE are still getting some RF feedback to target 1 & 2 when power is on
target 3; though it is better then before.  After removing the water lines
from targets 1 & 2 there was even less RF feedback, if any on the other 2
targets; it was hard to tell with a plasma on #3.  

AT the earliest convenience I will clean the  ceramic insulator rings of each
target and replaced the water lines between each target.  We believe the water
purity is high enough, measured at more then 1.8 Megaohms by the tylans.  There
could be metal particles or some type of conductive material within the randex
water lines.  We have some oil-free Aluminum that can be placed around
the other targets to prevent metal from getting onto your wafer; this
would also be a good way to see how badly the other targets are
sputtering, with out applying power to them.

NOTE: the randex is still up for use.

>>> 'randex' problem from hebert -- Fri May 11 13:39:20 1990 <<<

After the water flow problem was corrected, the RF power supply was OK.
I deposited Cu at 500 W and 10 mTorr (throttled cryo), and the film
was very hazy. I tried using 500 W after films deposited at 200 W
came out hazy. About 6 weeks ago we got good (not hazy) Cu films
in the Randex at 200 W (dep rate approx 6 A/s). The dep rate today at
200 W is also 6 A/s. 

There is either a leak or a cryo pump problem causing the films to
be hazy. I know that this problem was reported several weeks ago, 
and that after the "fix" a student successfully deposited Pt without
any haze. However, Pt is not reactive with O2 and one would not
expect Pt to be hazy even if a small leak is present.

We set-up the TOPGUN for Cu dep, and got good Cu films right away.

>>> 'randex' fix from rnorman -- Mon May 14 13:06:42 1990 <<<

Problem: Cu film hazy and arcing on external side of target.

Cause: The film being hazing could be cause by the quality of the 
       target. I think it was made out of just some oil free Cu in the
       mech.shop.  Either that or the cryo change had a effect of the
       sputter quality.

Solution: The target ceramics were cleaned in HCl/Nitric, the copper
         backing plates were cleaned with scotch brite.  Also, the temp
         of the cryo is at 15~C, about 3~High for this newer cryo, so
         tomorrow I will regenerate the cryo.  I don't think there is
         a leak because the vacuum is very good, at 2x10-7. The randex
         is up.

>>> 'randex' problem from rnorman -- Tue May 15 12:08:08 1990 <<<

After leak checking the system this morning a leak was found at the
gas input to the chamber, swagelok leaking.  The leak was repaired
and the chamber leak checked again in which no leak was found.  I then
ran a test wafer with Al @ 200 watts @ 200 sccm @ 6mt on the convectron
gauge.  The film look very cloudy.  At this time the cryo will be
regenerated and tomorrow the Ar line with be pumped out to the bottle
and leak checked. The cryo though could be causing part of this problem.  

User are free to use the randex tonight.
