>>> 'mrc' problem from phillip -- Thu Jan  4 11:23:35 1990 <<<

The 'inficon' thickness rate monitor has been repaired and
reinstalled on the mrc/nrc.
Dave Hebert's unit has been given back to him.
The mrc is up.

>>> 'mrc' problem from costello -- Thu Jan 18 11:40:28 1990 <<<

Argon/oxygen tank is almost empty.

>>> 'mrc' problem from costello -- Thu Jan 18 13:58:05 1990 <<<

Cryopump temperature is 26 K and it will only pump the chamber down
to 8*10-6 torr:  cryopump needs regenerating.

>>> 'mrc' problem from rnorman -- Thu Jan 18 14:59:51 1990 <<<

The cryo is purging at this time. Do not operate.

>>> 'mrc' problem from bob -- Thu Jan 18 15:51:41 1990 <<<

The mrc cryopump has been regenerated and is cooling down.
The mrc should be ready for use around 18:30 today.
A minor problem which does not effect the user need to be 
looked into. This is a slight leakage across the roughing valve
when the valve is closed. James Parrish has taken a quick look
at this problem and has OK'd the use of the system.
The mrc is up at 18:30 today.

>>> 'mrc' problem from straub -- Wed Jan 31 11:49:09 1990 <<<

the pnuematic hoist is terrible, particularly when lowering the top.  At first
it won't lower, then it will all of a sudden drop very quickly.  This makes
it particularly difficult to try and allign the shutter lever.  It feels like
the problem is that the gears are sticking on the track rather than an air valve problem.

>>> 'mrc' problem from bob -- Fri Feb  2 07:09:02 1990 <<<

The mrc is down for cleaning. Qualified users are performing this
operation.

>>> 'mrc' problem from bob -- Mon Feb  5 15:10:30 1990 <<<

The mrc has been cleaned. A new hoist cylinder will be ordered by James
Parrish and installed.

>>> 'mrc' problem from costello -- Wed Feb  7 12:01:04 1990 <<<

The temperature controller reads VERY eratically when the plasma
is ignited.  I can see the plasma envelop the thermocouple wire.
This did not happen before cleaning, I don't think.

>>> 'mrc' problem from bob -- Thu Feb  8 09:34:01 1990 <<<

Problem:   User reports erratic readout of the temperature controller.

Cause:     This is likely caused by a short of the thermocouple wires
           to it SS sheath. The type tc in the mrc is an "ungrounded 
           junction tc".

Solution:  The tc should be replaced. A spare is sitting on the machine.
           In addition I have ordered additional spares to have on hand.
           Currently the machine is enabled and in use by Marc Straub.
           When he is finished James Parrish will change the tc. Users
           should be warned that a short to ground through the tc
           will result in different bias conditions on the substrate
           holder.

           In addition, James Parrish will be repairing the hoist and
           also replacing an o-ring in the roughing valve.

>>> 'mrc' problem from straub -- Thu Feb  8 11:22:11 1990 <<<

read mail I sent to mrc et al today about the thermocouple problem.
It might also be worth taking a look at the high vacuum valve.  Unless
the crank is tightened  a couple of turns past where you can feel contact first
made I don't think that the valve is fully closed, and even then as you
watch the ion gauge readout it seems to respond slightly to things like venting
or opening the roughing valve.  I'm afraid to tighten the hi vac valve too 
much for fear of damaging the valve.  Am I just overly concerned over nothing?

>>> 'mrc' problem from ried -- Sun Feb 18 15:37:47 1990 <<<

Cleaned and installed plate for 4 inch wafers, but in the process
the temp controller wire cracked.  There is no temp control now.

>>> 'mrc' problem from ried -- Sun Feb 18 15:47:26 1990 <<<

An additional problem to the one above (no temp control),
the base pressure of the chamber seems limited to 2E-6 torr, though
the cryo pump will go down at least to 2E-7 torr.  (Even pumping
overnight, the pressure was 2E-6).  Thus there appears to be a leak.

>>> 'mrc' problem from ried -- Sun Feb 18 22:27:39 1990 <<<

My previous problem report about was in error - the chamber
is now pumped down below 2x10E-7 - there must have been a bad fit
on the gasket when I found the system originally.

>>> 'mrc' problem from costello -- Mon Feb 19 13:05:10 1990 <<<

The wires that connect the thermocouple plug to the feedthrough
are broken.  The ends of wire are too short to solder together.
New wires between the feedthrough and the plug are needed.  Do
these have to be made of thermocouple wire?

>>> 'mrc' problem from parrish -- Tue Feb 20 14:17:06 1990 <<<

1. hoist chattering comming down
2. t.c. wire disconnected
3. high vacuum valve closing with excessive force
system down for repairs, tomorrow morning may be up.

>>> 'mrc' problem from parrish -- Wed Feb 21 07:14:43 1990 <<<

update:   removed and replaced the high vacuum valve, regenerated the 
          cryo-pump and working on the t.c connection.

>>> 'mrc' problem from parrish -- Wed Feb 21 11:47:13 1990 <<<

problem:     1. high vacuum valve hard to close
             2. t.c. connection shorted
             3. hoist chattering, and roughing valve leaking
cause:       1. track that the wheels travel is worn
             2. broken connection
             3. off balance load, bushing worn, and the valve body worn
solution:    1. removed, cleaned and replaced, it will have to be used as is
             2. removed old t.c. and replaced with a new one
             3. removed solenoid and useing air only, it slow but it works
                and replaced the roughing valve. ststem is up.

>>> 'mrc' problem from ried -- Fri Mar  2 23:51:22 1990 <<<

There is a noncritical problem that the chamber lid will not raise to
sufficient height that the shutter arm will clear the side wall.
A solution might be to go back to the previous raising/lowering
scheme even though it was too fast at times - the speed of the
descent in the previous scheme could be reduced by turning off the
air pressure.

>>> 'mrc' problem from parrish -- Wed Mar  7 08:28:51 1990 <<<

system is down for rework of the hoist cylinder.

>>> 'mrc' problem from parrish -- Thu Mar  8 13:26:38 1990 <<<

problem:    hoist slow, and won`t clear shutter arm.

cause:      water in the oil lifting system, not allowing uniform flow

solution:   removed air cylinder, oil reservoir, and lines, cleaned and
            recharged the reservoir, reinstalled, adjusted, and checked
            the system. system is working.

>>> 'mrc' problem from parrish -- Tue Apr  3 09:15:17 1990 <<<

system down for regeneration of cryo-pump.

>>> 'mrc' problem from parrish -- Tue Apr  3 14:14:49 1990 <<<

problem:   temp. of cryo-pump at 25K

cause:     system was at that temp. when I came in this morning

solution:  regenerated system, system is up temp.15K
           base pressure at 2x10-7
