>>> 'lam3' problem from bob -- Wed Mar  7 13:56:43 1990 <<<

The following is a preliminary list for the new lam, lam3. This
is a bulkhead mounted aluminum etcher.

Power: 208, 5 wire
       220, 3 wire (chiller)

Gases: Aluminum Etch
       BCl3	100sccm
       N2	100sccm
       Cl2      100sccm
       CHCl3    (Chloroform liquid source)
       SF6      100sccm
       Passivation
       SF6      200sccm
       CF4      200sccm
       O2       20 sccm
From bob Fri Mar  9 13:42:36 1990
Return-Path: <bob>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA29137; Fri, 9 Mar 90 13:42:28 PST
Date: Fri, 9 Mar 90 13:42:28 PST
From: bob (Robert M. Hamilton)
Message-Id: <9003092142.AA29137@argon.berkeley.edu.>
To: hsing
Subject: lpe3
Cc: rosemary, voros
Status: RO

lpe3 came in damaged. I have placed a hold on any payments until the
problem is resolved. I have a call into David Sagi @ General Air.
Bob


>>> 'lam3' problem from voros -- Thu Mar 15 14:33:39 1990 <<<

John Newman called to let us know that lam3 requires heated manifolding
of the etch gases.

>>> 'lam3' fix from phillip -- Fri May  4 14:08:41 1990 <<<

The a.c. receptacle for the machine has been ordered.
It is type L21-30R from Alameda Electric-523-6933.
Material will be here Monday.
