>>> 'kasper' problem from phillip -- Mon Jan 22 07:23:22 1990 <<<

Replaced kasper exposure lamp prior to restart after power shutdown.
The log indicates the old one as being 10 months on-line.
(Bulb intensity set to max.500watts.)

The kasper is up.

>>> 'kasper' problem from cgoss -- Fri Jan 26 12:21:21 1990 <<<

the wafer stage does not lower completely when the eject button is pushed.

>>> 'kasper' problem from phillip -- Fri Jan 26 13:27:04 1990 <<<

The previous report concerning illicit chuck height was
in error. The kasper is up and working.

>>> 'kasper' problem from cgoss -- Fri Jan 26 13:55:41 1990 <<<

the stage still has problems keeping itself up when in Sep. mode
if you load, wait for the Sep light, then hit Contact, it stays.
But that is not really adequate because you need Sep to position wafer.
I did a simple test.  I raised stage with Mask Load on (light source up).
It stayed up, even after turning Mask Load off.  I then hit Vis. Al. to raise
light source.  Stage remained up.  Only after I hit Vis. Al. again to lower 
	Disregard above paragraph.  I think it has some problem keeping stage
up no matter what is done

>>> 'kasper' problem from cgoss -- Fri Jan 26 16:02:38 1990 <<<

the shutter is misaligned so that UV light is emitted when the shutter
is closed.  This causes premature exposure of wafers.

>>> 'kasper' problem from phillip -- Mon Jan 29 06:48:51 1990 <<<

P:a. Exposure lamp 'leaks' thru shroud b-4 mechanism is activated.
  b. Stage separation is not constant.
S:a. Repalced missing set screw in shutter arm.
  b. Increased chuck blatter pressure by a small amount.
     The separation may  need user adjustment on the knob
     labelled 'DO NOT TOUCH THIS KNOB'. This proceedure
     will be covered with Charlie.

The kasper is available for use.

>>> 'kasper' problem from khacha -- Mon Apr 16 13:27:34 1990 <<<


the mask support plate could not be risen after the exposure cycle was finished.

>>> 'kasper' problem from khacha -- Mon Apr 16 16:21:03 1990 <<<

once
again the mask support plate could not be lifted up

>>> 'kasper' fix from phillip -- Tue Apr 17 13:16:34 1990 <<<

P: Mask plate cannot be lifted up.
S: Could not get the mask plate function
   to fail. Tested o.k. 20 of 20 times.
No trouble found. This machine is up and
  available for use.

>>> 'kasper' problem from davor -- Wed Apr 25 17:00:22 1990 <<<

The chuck for the wafer refused to lower itself

>>> 'kasper' fix from phillip -- Thu Apr 26 10:45:23 1990 <<<

P: Wafer chuck will not lower.
S: Dissasembled and mtced. stage piston assembly.
   Mtced. separation distance gimbel assembly.
   Tha kasper is up and available for use.


(Thanks to Evan for his assistance.)

>>> 'kasper' problem from davor -- Fri Apr 27 12:55:51 1990 <<<

The row and column microscope is out of focus over its entire range.
Only by gently pressing down on the eyepiece was I able to focus the
image. Can someone please adjust the distance between the objective 
and the wafer plane. Thank you.

>>> 'kasper' fix from phillip -- Fri Apr 27 14:03:49 1990 <<<

P: Mask focus does not focus.
S: Adjusted focus such that it works.
   Davor checked it and agrees that it works fine.
The kasper is up and running.

>>> 'kasper' fix from phillip -- Mon Apr 30 13:16:25 1990 <<<

Explained to Ken (and Debra) how to adjust the 
'separation' distance between mask and substrate.
