>>> 'heatpulse1' problem from rnorman -- Mon Oct 30 08:29:08 1989 <<<

Problem: Intermittent readout; sometimes shows a negative temp.

Cause: The TC was intermittent.

Solution: A new TC was installed and tested.  The hp1 is up.

>>> 'heatpulse1' problem from bill -- Tue Nov  7 14:39:00 1989 <<<

I qualified Boom-Kim Liew today.
I watched to assure that the door was closed correctly -
but we still had a very strong ammonia smell in the VLSI.

Also the "drawer" does not slide smoothly any more
and the door nuts do not always hold.

I know that this system is poorly designed and has
been a frequent headache - but I have used NH3 before
and never had any smell in the lab.

I told him to go ahead with non NH3 processing
and that I would report the problems.

>>> 'heatpulse1' problem from bill -- Tue Nov  7 14:57:17 1989 <<<

Recommendations to solve previously reported problems :

1) The chamber could use a cleaning - just removing it
   and reinstalling it should serve to solve most of the
   drawer and door problems - it's been over 8 months
   since the last chamber clean.

2) Please update the activation message to include either
    a) a restriction on NH3 use or
    b) a reminder to load and unload in inert ambients only.

>>> 'heatpulse1' problem from rnorman -- Wed Nov  8 11:17:54 1989 <<<

Problem: NH3 leak and dirty chamber.

Solution: The chamber was removed and cleaned in HF/H20.  The sticky
        door was caused by a loose screw that was tightened up. Also
        one of the latches on the door was not locking in place, due to
        the locking tab broke; the tab was temporarily fixed, but a new one
        will need to be ordered.  I ran NH3 for a test and no leak was
        noticed, enless you open the exhaust box door while NH3 is in the
        chamber.  NOTE: The exhaust box was put on for a reason to confine
        leaking NH3.  DO NOT OPEN THE BOX WHEN NH3 IS IN USE!!  Purge with
        N2 at least 2-3 minutes after NH3 use; this is for your safety and
        others in the VLSI.  The hp1 is up.

>>> 'heatpulse1' problem from kim -- Fri Dec 15 13:15:20 1989 <<<

Problem:  I annealed ZnO today.  R. Norman will clean the chamber
          for the contamination.

>>> 'heatpulse1' problem from rnorman -- Mon Dec 18 09:51:36 1989 <<<

Problem: The chamber was dirty/contaminated.

Cause: User annealed ZnO, per Katalin's OK.

Solution: Removed the chamber and cleaned in HF.  The chamber
          was installed and tested.  The HP1 is up.

>>> 'heatpulse1' problem from seh -- Wed Jan 24 13:19:32 1990 <<<

Did three runs, 3 minutes at 1000C plus a couple of test runs with Bill.
Did a 1100C, 30 second run during which the sensarray t.c. failed.
The connecting wire near where the wire comes out from under the wafer
is visibly vaporized.

>>> 'heatpulse1' problem from rnorman -- Thu Jan 25 10:48:51 1990 <<<

Problem: T.C. failed

Cause: TC fried on the substraight wafer, sensarry.

Solution: The SensArray TC was repaired by spot-welding the wire
          back together.  Also, a new T-type TC was made and installed.
          The hp1 was tested and is up for use.

>>> 'heatpulse1' problem from liang -- Tue Feb 20 20:27:30 1990 <<<

Someone did not close all three volve on both Ar bottle and 
the flow meter,  the heatpulse is run out of Ar gas now. 
I use NH3, so no problem for me, but next user may want to use
Ar, so please replace.

>>> 'heatpulse1' problem from rnorman -- Wed Feb 21 13:10:23 1990 <<<

Problem: Ar bottle empty and possibly a leaky regulator valve.

Solution: Evan must have replaced the bottle because a full one
          is now there.  I cheched out the valve and it is not 
          leaking.  The hp1 is up.

>>> 'heatpulse1' problem from rnorman -- Fri Mar 23 12:51:07 1990 <<<

The heatpulse1 will be down for a chamber clean.

>>> 'heatpulse1' problem from rnorman -- Fri Mar 23 14:21:14 1990 <<<

Problem: Chamber contaminated with GaAs with Katalin's OK.

Solution: The chamber was removed and clean with HF and H2O.
          When the chamber was installed and new TC was installed.
          The hp1 was tested and is up with a clean chamber.
 

>>> 'heatpulse1' problem from qian -- Tue Mar 27 12:36:56 1990 <<<

I didn't use it. Could you change the chamber for Si?
