>>> 'ee143' problem from phillip -- Mon Jan 22 10:51:03 1990 <<<

One of two port selector terminals is absent from the lab.
The trouble log indicates it was removed approx. 12/1/89
This needs be returned by the opening on instruction.

>>> 'ee143' problem from phillip -- Thu Jan 25 07:43:29 1990 <<<

P: "FREEDOM" port selector terminal gone from lab.
   Is there an ETA for when this terminal will be
   back on-line?

>>> 'ee143' problem from phillip -- Thu Jan 25 08:51:36 1990 <<<

There is no ICW currently in rm.218.  Scott McNally, the stationary
engineer, will be notified thru Eleta.
 Eleta, this is the 143lab (rm.218). Please have Scott check the
source of the water shutdown. Have him see me if access is required.
Thank you.

>>> 'ee143' problem from bob -- Thu Jan 25 15:05:58 1990 <<<

We are investigating improvements in the Kasper mask aligner.
There are several possibilities. We can upgrade the present tool
for easier use and more reliability or secure another tool.
One possibility is a Canon PLA500-501 FA contact/proximity aligner.
Tony Ha of Canon is looking into the availability of this machine.
Progress will be reported when more information is available.

>>> 'ee143' problem from bob -- Fri Jan 26 07:24:59 1990 <<<

A problem has been reported reagarding the loss of water pressure
for Rm 218. It is imperative that water be available. A phone call
will be placed to Eleta (Adm. Assistant for the Dept. Eng.)
as to the status of this repair. Urgency will be requested.

>>> 'ee143' problem from phillip -- Mon Jan 29 08:25:51 1990 <<<

ThThe Industrial Cold Water has been restored to rm.218.
Thanx to Eleta for her assistance.

>>> 'ee143' problem from phillip -- Mon Jan 29 09:33:41 1990 <<<

rm.218 update:

 1. All equipment (except furnaces) tested and operational
 2. The 'polymetrics' final d.i. rinse is recircing at 18Mohms.
 3. All gases replenished.
 4. The video cart and movie are in place per Prof. Cheung's request.
 5. Only one computer terminal in place. No status on
    the missing Freedom terminal.


Bill Partlo, I need to meet with you concerning daily
operation. Please contact me soon.

>>> 'ee143' problem from phillip -- Thu Feb  1 08:27:52 1990 <<<

Would the ta who last uses the video cart and movie please
let me know. I will retrieve the tv when you are done.

>>> 'ee143' problem from phillip -- Tue Feb  6 10:32:48 1990 <<<

Problem:  The small, free standing air conditioner in the 
          service chase of rm.218 is not working.

          Eleta, can you please have John Tusting check
          this out this week? The furnaces go on Monday
          morning and it will be unbearable then without
          the a.c.

>>> 'ee143' problem from phillip -- Tue Feb  6 11:35:00 1990 <<<

The air conditioner has been checked and found operating.

(Eleta, thank you for the timely service call)

>>> 'ee143' problem from phillip -- Wed Feb  7 06:38:16 1990 <<<

Al foil replenished per Ben Costello's request.
The hf sink aspirator will be checked.

>>> 'ee143' problem from bob -- Wed Feb  7 16:12:53 1990 <<<

The kasper chuck will not raise to the plate level. Likely the
bearing needs to be cleaned and oiled. This pm typically is
done at 6 mos. The hoses under the bearing are jamming the
chuck and preventing it from making the lower limit. These
will be rerouted when the bearing is oiled in the morning.

>>> 'ee143' problem from phillip -- Thu Feb  8 07:21:04 1990 <<<

P: kasper *not* working .
S: Replaced defected input air regulator.
   Reseated SV supply tubing. Set all
   internal regulators to correct values.
   Features tested.

The kasper is up and available for use.

>>> 'ee143' problem from phillip -- Fri Feb  9 09:03:29 1990 <<<

P: Poor exposure on part of wafer. (Perhaps the shutter is
   not opening?)

S: Shutter found in good working order.
   Replaced u.v. bulb. Aligned bulb intensity
   to view window.

The kasper is up.

p.s.  The furnaces have been turned on.

>>> 'ee143' problem from phillip -- Tue Feb 13 06:10:42 1990 <<<

P: Nanaospec terminal does not work (per Bill).
S: Reset terminal. When turning on the printer,
   instructions will print on the paper tape 
   prompting user for a 'yes' or 'no' on terminal
   use. 
   The nanospec and remote terminal are up and available
   for use.

(There is a nanospec manual located near the machine.)

>>> 'ee143' problem from phillip -- Fri Feb 16 09:02:01 1990 <<<

per cjkim's report:

1. There are 'scavenger ducts' at the front of each furnace
   tube. These are under negative pressure to the room. 
   The duct covers were closed. I slid them open.
   The tube exhaust is vented in this fashion.
2.The vacuum for the spinner has been repaired.
3.The sink aspirator on the right now works.

T.A.'s ,
 After rinsing and scratching bottle labels off
the empty bottles, put them in the trash containers
and the custodian will remove them.

Christine,
 Bill Partlo cleaned out the chemical c-lockers.
This created a one-time abundance of empty bottles.
There are discardable bottles in front of the c-lockers
and in the service chase.
 Please remove these to the microlab and dispose of them
accordingly.This should be a one-time task.
Thank you very much.

>>> 'ee143' problem from bob -- Tue Feb 20 10:55:35 1990 <<<

The spinner has problems with its vacuum control. I will discuss
with Phillip, a possible solution. In the meantime the spinner
is working and available. The foot pedal may require a couple
of actuations for operation.

The chuck is badly worn and needs replacing. An order for
a new one is bsing submitted.

>>> 'ee143' problem from phillip -- Tue Feb 27 10:29:52 1990 <<<

P: No n2 in dewar.
S: As is the plan, the n2 regulator was switched to 
   a reserve bottle directly next to the LN2 dewar.
The 143lab is up for use.

>>> 'ee143' problem from phillip -- Wed Feb 28 13:53:59 1990 <<<

P: Spinner will not spin.
   Furnace controls unmarked.

S: Activated supply air for vacuum eductor for spinner.
   Marked O2 supply furnace tube.

The problems as reported by Klaus are remidied.

>>> 'ee143' problem from phillip -- Mon Mar  5 08:04:36 1990 <<<

Per Ben Costello: A new apron has been placed in the process room.
Per Bill Partlo : The d.i. deck gun on the right hand sink that leaks
                  has been repaired.

>>> 'ee143' problem from phillip -- Tue Mar  6 14:05:36 1990 <<<

Replaced new washers in Galtek d.i. deck gun (per
cjkim's request).

A new pen has been placed on the blackboard.
More pens have been ordered (per cjkim's request).

>>> 'ee143' problem from phillip -- Wed Mar  7 08:09:30 1990 <<<

A short push/pull quartz rod has been placed on 
the furnace per Ben's request.

>>> 'ee143' problem from phillip -- Fri Mar  9 09:02:26 1990 <<<

(per cjkim's report)
P: The Headway spinner tosses wafers at the end of 
   the spin cycle.
S: Cleaned out/off much resist from in and around
   the vacuum port. Cleaned chuck and replaced o-rings.
   The spinner is up.


ta's please note: please TRY not to deluge resist
                  onto chuck or into spinner vacuum port.

>>> 'ee143' problem from phillip -- Tue Mar 13 08:08:55 1990 <<<

Turned off fans to (previoously turned off) furnaces.
Replenished glove supply.

The problems as reported by Bill are fixed.
From phillip Tue Mar 13 13:30:44 1990
To: ee143
Subject: polymetrics rinse tank
Cc: $pf/ee143-p


The cell selector switch works as follows:

Setting#1 is the input water. This should always be high ~14Mohms.
Setting#2 is the return water. Set the switch here while rinsing
wafers. You will see a dip. When this comes back to around 10Mohms
the wafers afre as clean as this tank will make them.

This is in answer to a question asked today.


>>> 'ee143' problem from phillip -- Tue Mar 13 14:34:43 1990 <<<

P: The spinner will not hold wafers. The analytical area is being
used so the problem will be repaired early tomorrow a.m.

>>> 'ee143' problem from phillip -- Wed Mar 14 07:34:59 1990 <<<

Replaced several parts of spinner chuck vacuum system.
The pr spinner is up and available for use.

>>> 'ee143' problem from phillip -- Mon Mar 19 06:46:06 1990 <<<

1. The sintering furnace (linberg#1) was turned on today.
   It should be ready for use after it stabilizes (by tomorrow).
2. Paper towels and kleenex have been supplied.
3. More AL staples and new evaporation boats have been ordered.

All requests by the ta's (for this lab) have been fulfilled.

>>> 'ee143' problem from parrish -- Tue Mar 20 10:43:45 1990 <<<

problem:    pirani gauge not showing pressure

cause:      the valving sequence not operating

solution:   took system out of automatic, manuelly operated the valves
            returned to automatic and sequenced the valving system.
            valves are opening and closing properly.

>>> 'ee143' problem from phillip -- Tue Apr  3 09:24:45 1990 <<<

P: kasper 'load manual' switch has no effect.
S: Restored air supply to machine.
   Replaced broken 'loaded manual switch
   cap. The kasper is up and available for use.

The lab session in progress was able to use this machine
and  DID NOT have to come to the microlab for their section.

>>> 'ee143' problem from phillip -- Thu Apr  5 07:00:30 1990 <<<

P: kasper exposure parameters are lacking in 
   uv lamp intensity.
S: Replaced exposure bulb. Collimated and
   adjusted exposure settings for maximum
   uniform intensity.
The problem as reported by Ben is repaired.
The kasper is up and available for use.

>>> 'ee143' fix from voros -- Mon Apr 30 08:41:32 1990 <<<

Jeff Lane from Quintel will be here tomorrow to pick up the Kasper
for the rebuild. Phil has been notified and will handle it.

>>> 'ee143' fix from phillip -- Tue May  1 06:52:01 1990 <<<

The kasper is 'bagged up' and ready for transport to
the factory for a retrofit. It is therefore OUT OF SERVICE.

>>> 'ee143' fix from phillip -- Wed May  2 07:23:46 1990 <<<

The kasper was picked up yesterday by Quintel and brought
to their factory. It is receiving the stage/loading retrofit.
It will be gone 4 to 6 weeks.
