>>> 'eaton' problem from hebert -- Thu Jan 11 07:32:48 1990 <<<

I coated 4 wafers using program 10. All but one has a "bulls eye"
pattern on it after P/R coat.

>>> 'eaton' problem from rnorman -- Thu Jan 11 09:51:18 1990 <<<

Problem: Coated wafers had a "bulls eye" pattern in the center.

Cause:  Either, the suck back was out of adjustment or there was
        too long a delay between the PR deposit and the spin.
        
Solution: The such back was out of adjustment and was applying
          a bubble on the wafer. Also, there was about a 3 sec.
          delay after the deposit of PR; this time included a
          small delay between application of PR and descend to the 
          lower position, the descend time, and a small delay
          after descend before spin.  By experiment it was found
          that applying PR when the wafer is in the down position
          decreases the delay time to 1 sec.  Tom made a new program
          at recipe #5 that is just like recipe #10, except the PR
          is applied in the down position.  Dave Hebert ran some
          good wafers and they turned out great! The eaton is up.

>>> 'eaton' problem from spence -- Fri Jan 19 16:34:51 1990 <<<

first wafer runs ok up to the hot plates, then the track hangs up.
I tried moving the wafer around to see whether it was a sensor problem,
but it didn't help. After a couple of minutes of playing around like this the 
problem 'cleared' and the rest of the wafers ran without problems.
This problem, i.e. the track hanging up during the passage of the first
wafer happened to me twice today.

>>> 'eaton' problem from rnorman -- Mon Jan 22 09:39:17 1990 <<<

Problem: Wafer stopping before hot plate.

Cause: Either the sensor at the entry to the hot plate is not
       sensing the wafer or the exit cassette was not in the 
       down position; wafers will not go onto the hot plate
       if the exit cassette is not in the down position.

Solution: I could not duplicate the problem after running
          3 cassettes.  The eaton is up.

>>> 'eaton' problem from weijie -- Thu Jan 25 21:46:18 1990 <<<


First the sending cassette wouldn't go down regardless of the position,
contact, etc.  After cycling the power, error msgs 16 is given indicating
programs were lost.   

>>> 'eaton' problem from rnorman -- Fri Jan 26 07:19:27 1990 <<<

Problem: Send cassette would not go down and error 16, empty program.

Solution: I did find the system in manual, but it should be in AUTO
          to operate properly.  After putting it in auto there was
          no problem with the cassettes indexing down.  As for the
          "empty program" error, every program was GONE.  I could only 
          enter in 8, 10 and 17, since they were the ONLY ONES in the
          eaton manual; #4, 5(hebert's), 16 and 18 ARE NOT in the
          manual so I could not enter those into the eaton.
          The eaton is up for use with recipe 8,10 and 17 ONLY.

         NOTE: ALL programs should be in the manual, I have many times
               said this!

>>> 'eaton' problem from jiahua -- Fri Jan 26 10:08:59 1990 <<<

Sometimes the reciving cassette switch didn't work very well.

>>> 'eaton' problem from debra -- Fri Jan 26 13:12:43 1990 <<<

Programs 4, 16, 18 have been re-entered. The receiving cassette
reset switch must be pressed firmly to operate. eaton is up.

>>> 'eaton' problem from carlos -- Thu Feb  1 22:34:49 1990 <<<


The alarm beeps all the time, but it is working ok.

>>> 'eaton' problem from rnorman -- Fri Feb  2 07:22:52 1990 <<<

The eaton is making beeps like a random code.  The LEDs are
flashing randomly, which seems to amplify the beeps.  This 
could be related to a intermittent cable/wire or a ground
problem. Also, the interface panel was pulled out.
Does anyone know when this random beeps started, was it all
at once or did someone do something and then it started?

>>> 'eaton' problem from bob -- Fri Feb  2 09:57:01 1990 <<<

The eaton is experiencing CPU problems. Robert Norman has left for
Eaton Corp. to pick up some loaner boards to try and fix this 
problem before the weekend. He will be back this afternoon.
The eaton is up with mixed results.

>>> 'eaton' problem from rnorman -- Fri Feb  2 14:21:58 1990 <<<

Problem: LED's randomly flashing with random beeping noise.

Cause: The Operator CCU board was causing the static display.

Solution: Eaton Loaded use for the weekend the CCU and the CPU
         board for testing and use until next week.  After installing
         the barrowed CCU board the eaton operates fine with not
         other noticeable problem.  Recipes 8, 10 and 17 were programmed
         in from the wand and Tom programmed in the rest.  The eaton
         is up for use at this time.

>>> 'eaton' problem from kim -- Fri Feb  2 17:08:47 1990 <<<

Error 33: cassette is not descending.
Can no spin R. Ferguson's wafers.

>>> 'eaton' problem from ried -- Fri Feb  2 23:28:27 1990 <<<

After Carlos showed how to loosen the big screw on the sending
cassette, I was able to overcome the problem reported by Kim.
The sending cassette sensor is very finicky - it takes many 
cassette adjustments to get the eaton to start.

>>> 'eaton' problem from rnorman -- Mon Feb  5 07:24:46 1990 <<<

Problem: Send cassette stuck; error 33.

Cause: By the previous problems report the send cassette drive
       got stuck, displaying error 33.

Solution: After running 2 cassettes I could not duplicate the 
          problem. I have seen the cassettes get stuck, possibly
          by driving the cassette down too fast.  If you get
          error 33: first try pushing the reset button, on top
          next to the cassette, this should cause the cassette
          to move.  If you still get error 33 move the indexing
          screw on the bottom backside of the cassette platform;
          this should loosen up the jammed mechanical movement. 
          Please do not do the latter, enless necessary, such as
          late at night or weekend; look me up during the mean time.
          The eaton is up.
~
          

>>> 'eaton' problem from liew -- Sun Feb 18 19:22:35 1990 <<<

The arm often fails to catch the first wafer (before the spinner) when
N2 is turned on the first time. It has no problem with the next wafer. So always
send a dummy wafer after you turn on N2.

>>> 'eaton' problem from field -- Tue Feb 20 15:32:50 1990 <<<

As Debra reported, I saw the eaton refusing to pick up the
first wafer of a batch.  However, it did not happen on
the first batch of wafers I processed, using program 9
to spin photoresist, despite the fact the N2 had been off.

It did happen on the second and third batch of wafers I processed,
using program 4, once where the N2 had not been off and
once where I had deliberately left the N2 on to see if
that really would fix the problem.

>>> 'eaton' problem from tom -- Tue Feb 20 16:49:40 1990 <<<

The wafer centering arm is moving down into position very slugishly and 
is not always catching the wafer in time. This is causing the problem
with the first wafer (it must loosen up after the first wafer) 

	The cause of this is a leak in the compressed air line. It is
damaged (worn) right where it connects to the cylinder and needs to berr
replaced.

>>> 'eaton' problem from rnorman -- Wed Feb 21 08:21:16 1990 <<<

Problem: Wafer centering arm moving slugishly.

Cause: Possibly a leak in one of the air lines connected to the 
       drive cylinder.

Solution: Re-plumbed pneumatic air line and ran 4 cassettes with
          no problems.  The eaton is up.

>>> 'eaton' problem from rnorman -- Mon Feb 26 10:45:45 1990 <<<

Problem: The Operator CCU card was set out to repair a static 
         problem caused by the board; the LEDs flickered and
         beeps occurred randomly.

Solution: Eaton Service in Tex. repaired/replaced: CR1, CR3(diodes),
         C36(large cap), Z16(IC L2046391), VR1(Power Transistor) and 
         K1(relay).  We do not have a service report, but this was
         conferred by talking to Troy @ Eaton, Tex. Field Service.
         The repaired board was installed and the loaned boards will
         be sent back to Eaton, Santa Clara; we have had the boards for
         approx. one month.  The eaton was tested and is up.

>>> 'eaton' problem from bill -- Mon Feb 26 16:09:02 1990 <<<

An old problem has reappeared :
the wafer will not advance from the post spin station,
to the hot plate.

An old fix was performed :
Turn it on and off and keep your fingers crossed.

Wafers now advancing with no problem...

All other eaton functions seem fine.

>>> 'eaton' problem from marilyn -- Tue Mar  6 11:37:16 1990 <<<

Problem: Receive cassette elevator jammed; does not reset.

>>> 'eaton' problem from debra -- Tue Mar  6 11:51:53 1990 <<<

I was able to clear the jammed cassette. I noticed that one of
the belts had slipped off, so I replaced it. However, the
cassette is not adjusted to the right height. When a wafer
is loaded into the receive cassette, it pushes the cassette
up and backwards, thus causing a system alarm. the cassette
needs to be adjusted before running more than one wafer.

>>> 'eaton' problem from rnorman -- Tue Mar  6 14:02:55 1990 <<<

Problem: Wafers pushing receive cassette over causing an error.

Cause: The cassette indexer height set too high causing wafers to
       hit the bottom side of the cassette slot.

Solution: The height of the cassette was way off!  Someone must have
          adjusted this out resently.  I had the adjust the set screw
          about 1 1/2 turns, this is a long ways.  Also, the belt drive
          motor pulley was loose, causing the belt to pop off, and way
          off center; it was adjusted and set into position.  The eaton
          was tested and is up.

>>> 'eaton' problem from hebert -- Tue Mar 13 12:11:19 1990 <<<

The wafer gets stuck on the belt at the unload cassette.

>>> 'eaton' problem from hebert -- Tue Mar 13 15:16:04 1990 <<<

Problem: Wafer getting stuck on the belt in front of the unload
         cassette.

Solution: I lowered the optical encoder strip at the unload station
          to align wafer with the cassette slot. The optical encoder
          is at its lowest possible position. The first wafer unloads
          very smoothly. The second wafer unloads smoothly but tended
          to cause the cassette to tilt from the top to the bottom of
          the cassette. I added a couple of layers of tape to the 
          left rear cassette table shim to prevent the cassette from
          tilting.

          Six wafers were then run through the Eaton using PRG "0."
          All six unloaded smoothly without the cassette tilting.

          The Eaton is UP.

>>> 'eaton' problem from rnorman -- Thu Mar 15 07:43:50 1990 <<<

The eaton will be down to adjust the exit cassette and other problems.
It will be down for about 1-2 hours from this time.

>>> 'eaton' problem from rnorman -- Thu Mar 15 08:29:19 1990 <<<

Problem: Wafer not entering receive cassette properly causing
         cassette to tilt.

Cause: Indexer screw a little out of adjustment.

Solution: After adjusting indexer screw initially 30 wafers were ran
          before a problem occurred; wafer hit front on cassette and
          did not enter in.  Re-adjustments were made and 65 wafers
          were ran with no indexing problems.  The eaton is up.

>>> 'eaton' problem from jiahua -- Fri Mar 16 05:01:45 1990 <<<

The receiver doesn't work.

>>> 'eaton' problem from rnorman -- Fri Mar 16 06:25:51 1990 <<<

Problem: The receive cassette platform jammed in the up
         position.

Solution: I turned the indexing screw, worm gear, to un-stick the
          platform.  Sometimes this happens, it just indexes up too
          far; I will keep my eye on this problem to see if it reoccurs
          often.  The eaton is up.

>>> 'eaton' problem from ling -- Mon Mar 19 21:18:14 1990 <<<

wafer receiver doesn't come down.

>>> 'eaton' problem from rnorman -- Tue Mar 20 07:07:31 1990 <<<

Problem: The exit indexer station does not index down.

Cause: The indexer station was jammed up top; hit the top plate.

Solution: The indexer was totally readjusted.  It was adjusted
        down a whole slot and adjusted there for the wafers.  This
        will/should leave some space at the top for an error factor
        while indexing to the upper limit.  2 full cassettes were ran
        and the eaton is up.

>>> 'eaton' problem from ling -- Wed Mar 21 17:16:00 1990 <<<

receive cassette doesn't go up, before I start to run.

>>> 'eaton' problem from rnorman -- Thu Mar 22 14:50:30 1990 <<<

Problem: The receive cassette got stuck at bottom.

Cause: The optical sensor was not seeing the stop point on the 
       encoder strip.

Solution: The encoder strip was adjusted horizontally to help
          the sensor see the stop slot.  I am in the process of
          ordering parts for the indexer to help make it more
          relyable; such as, new sensors, Bushings, lead screw,
          ball bearing, timing belt and spacers to prevent slack
          while indexing.  You will be informed when these parts
          arrive for the eaton indexer to be rebuilt.  The eaton is
          up for use.
From bob Fri Mar 23 08:36:00 1990
Return-Path: <bob>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA07136; Fri, 23 Mar 90 08:35:57 PST
Date: Fri, 23 Mar 90 08:35:57 PST
From: bob (Robert M. Hamilton)
Message-Id: <9003231635.AA07136@argon.berkeley.edu.>
To: rnorman
Subject: eaton
Cc: voros
Status: R

Ali called from Eaton, He has some of the parts you need, Austin has
some and some are on 4-6 weeks back order. He suggests you stop in and
he can get you some used parts in like new condition for very good
price and go over the indexer with you. For instance, the indexer
module harness whcih contains the sensor is $800.00 per and 5-6 week
delivery! The bearings are available form King Bearing stock and
he can gice you the bearing number. Eaton wants $22.46 each for these.

Ali is out on a service call and will be back in around
1:00. Give him a call.

Bob


>>> 'eaton' problem from kpister -- Fri Mar 30 10:09:09 1990 <<<

the usual cross threading around wafer 5 or six was occurring, but
there was an additional problem I haven't seen before:  As wafer
seven is about to enter the receive cassette, the cassette is raised
to HIGH (!) and the wafer hits the nub between slots, preventing it
from entering, and halting the machine.

>>> 'eaton' problem from field -- Fri Mar 30 18:12:03 1990 <<<

As did Kris Pister, I'm having problems with the Eaton receive cassette.
It wouldn't receive a wafer (any out of 3 tries) - the slot seems to
be offset from where it could receive a wafer.  Furthermore, the
cassette wouldn't come up when I pressed the reset button.  I manually
removed it (it wasn't jammed), but the drive still won't come up
on the receive side.

>>> 'eaton' problem from mwei -- Fri Mar 30 19:18:52 1990 <<<

es
Wafers are not being loaded into the receiving cassette properly.
Something is off with the receiving cassette alignment and its elevator stand.
See also previous two problem comments for eaton.

>>> 'eaton' problem from rnorman -- Mon Apr  2 08:08:39 1990 <<<

Problem: Wafer were not being loaded into the recieve cassette
         properly.

Cause: The receive cassette encoder was a little out of adjustment.

Solution: The encoder on the receive cassette was adjusted.  The 
          eaton is up.

>>> 'eaton' problem from rnorman -- Tue Apr  3 07:04:35 1990 <<<

The eaton will down to rebuild both indexers.  You will be notified
when it is up for use.  The rebuild may be done by noonish, if all
goes well.

>>> 'eaton' problem from bob -- Tue Apr  3 10:17:45 1990 <<<

The eaton is down. It should be up and available for use right
after lunch. 

>>> 'eaton' problem from rnorman -- Tue Apr  3 14:42:20 1990 <<<

Problem: Down for indexer rebuild.

Solution: The right or receive indexer was removed and rebuilt
         as follows:
          -all 3 optical sensors were replaced
          -the lead screw or worm gear bearings and delron boshing
           was replaced.
          -The teflon bushng for the guide rod was replaced
          -all the drive belts were replaced
     
     The indexer was installed and adjusted. 50 wafers were ran with
     no problems.  Tomorrow I will rebuild the left indexer.  The eaton
    is up for now.

>>> 'eaton' problem from rnorman -- Wed Apr  4 07:56:12 1990 <<<

The eaton will be down to rebuild the send indexer.  You will be 
notified when it is up.  You may use the eaton in "manual" until
I re-install the indexer.

>>> 'eaton' problem from rnorman -- Wed Apr  4 12:18:27 1990 <<<

Problem: Down for send or left indexer rebuild.

Solution: The indexer was removed and the following was done:
       -replaced all optical sensors, #1990-00023.
       -replaced ball bushing in the lead screw block, Thomson
        part number A61014, eaton # 1410-00084.
       -replaced teflon bushing for guide rod, #400-36273-01.
       -lower lead screw bearing was replaced, #1410-00224.
       -large indexer belts were replaced, #0905-00158.
       -motor drive belts were replaced, #0905-00151.
       -replaced lead screw timing belt, #1500-00105.

    The lead screw and large guide rod was cleaned and coated with
    molyCote for dry lubrication.  I ran out of the small indexer
    belts, because we use 6 for both indexers; I will order some
    for spares and then replace the 2 old ones on the send indexer,
    eaton #0905-00155.  The indexer was installed and adjusted.  The
    system was tested and is up for use.

>>> 'eaton' problem from carlos -- Tue Apr 10 20:43:18 1990 <<<

I can't get prog. 10 running. The loading cassete will not go down 
and the chuck is up no matter what. Has the program been erased ?

>>> 'eaton' fix from debra -- Wed Apr 11 10:23:43 1990 <<<

Problem was traced to dispense nozzle assembly. If this assembly is
not pushed to left as far as it will go in order to "make" the limit
switch. If it is not in this position, you will be unable to run any
processes.
From debra Wed Apr 11 11:30:13 1990
Return-Path: <debra>
Received: by argon.berkeley.edu. (4.1/SMI-4.0)
	id AA06691; Wed, 11 Apr 90 11:30:10 PDT
From: debra (Debra Hebert)
Message-Id: <9004111830.AA06691@argon.berkeley.edu.>
To: voros
Cc: bob, debra
Subject: eaton
Date: Wed, 11 Apr 90 11:30:08 PDT
Status: RO

   Katalin, After fixing one problem with the eaton, a new
   one ocurred. I was unable to change programs on the eaton,
   even after resetting the system by powering if off and on.
   Robert and I traced it to a key on the purge/sensor panel
   which had been turned off by someone. This key disables
   the controls when turned, which makes it impossible to
   change programs. I have a feeling it might have been Carlos
   who turned it in an attempt to get program #10 to run last
   night. I have removed the key, and will label it Eaton Control
   Panel and give it to Rosemary(?). Should I communicate with
   Carlos about this?   Debra
--------


>>> 'eaton' problem from field -- Wed Apr 25 13:04:36 1990 <<<

eaton tending to put wafer off-center on belt after PR spin station.
This results in sporadic alarms when the machine attempts to
transport the wafer to the hot-plate.

>>> 'eaton' fix from rnorman -- Wed Apr 25 13:40:20 1990 <<<

Problem: Giving errors after the spin station before the hot plate.

Solution: After running 50 wafers, half with a spin and half not, no
        errors were found.  Sorry.  The eaton is up.

>>> 'eaton' fix from rnorman -- Thu May  3 07:56:33 1990 <<<

Problem: Temp. on cold plate fluctuating. Also, ate a wafer at send cassette.

Cause: The cool plate, if the heater was on, can only go to about 70~C; so,
       temperature readings of 300~ are erroneously caused mostly by the
       RTD temperature probe.  The 2nd problem looks like to be cause by the
       carriage jamming up/sticking as it moves wafers from the cassette to the        chuck, this was the only problem I noticed.

Solution: The guide rods of the carriage were cleaned and lubricated; after 
         testing it did not stick.  Another RTD may have to be ordered and 
         replaced in the cool plate.  Until then ignore the erroneous 
         temperature readings, they are not correct.  The eaton is up for use.

>>> 'eaton' problem from hebert -- Mon May  7 15:39:52 1990 <<<

The wafer transport failed several times just as the wafer was
approaching hotplate #1, and just before unload.

>>> 'eaton' fix from rnorman -- Tue May  8 07:50:24 1990 <<<

Problem: Wafer failed just before hot plate, and just before the receive side.

Cause: The exit cassette was sticking a little, not indexing up or down all
       the way.

Solution: The drive gear was lubricated at both ends, where the bearings are.
          It was tested manually and then by running 15 wafers with no problem.
          The eaton is up for use

>>> 'eaton' problem from judy -- Mon May 14 14:46:10 1990 <<<

Cold plate temperature rises very rapidly when a wafer is placed on it.
For example the TC reads 23.1 C before the wafer is put on the cold
plate and around 300.0 C after!?!  Maybe the water which is supposed to
keep the cold plate cool is off?
