>>> 'canon' problem from rolfe -- Wed Jan 24 10:44:51 1990 <<<

Dummy wafer missing.
Headway spinner is a mess.
Microscope lights and Y1 and Y2 left on.

>>> 'canon' problem from miklich -- Mon Jan 29 20:14:36 1990 <<<

When the wafer chuck for odd-shaped pieces (not for standard, 2" wafers) is under the disk, there is a strange hissing sound.  The problem is not apparent when
the chuck is actually pressed to the disk (as it is just before exposure), but 
rather just when it is sitting on the turn-table just underneathe the disk.  
Also, when this chuck is pressed against the disk, the "vacuum" gauge reads only40cmHg.  Neither of these problems is present with the standard, 2" chuck.  
Perhaps there is a faulty or loose vacuum line.

Note: the standard disk was in place when I noticed these problems.  I didn't 
check if they went away if the new disk was used.

>>> 'canon' problem from seh -- Thu Feb  1 10:14:36 1990 <<<

I didn't have the problem that was noted by the previous user.
However, when moving the field of view with the knob on the upper
right a noise is observed which I've never noticed before and the
movement of the field is not as smooth as it used to be.	

>>> 'canon' problem from seh -- Thu Feb  1 11:48:37 1990 <<<

Problem was fixed by Kim

>>> 'canon' problem from bob -- Thu Feb  1 13:22:53 1990 <<<

Microscope problems described by seh have been taken care of by
Kim Chan. The canon is up.

>>> 'canon' problem from cleland -- Fri Feb 23 15:48:36 1990 <<<

First chip on a 9 chip exposure pattern is often completely out
of focus. Doesn't develop out. I've wasted 3 wafers this way already!

>>> 'canon' problem from bob -- Wed Feb 28 11:38:01 1990 <<<

cleland reports the first die exposed on the canon is
often (3 out of 3X for him) out of focus. A check of
the chuck reveals no problems.

The Process Supervisor will look into this problem and 
repairs will be made if warranted.

>>> 'canon' problem from bullard -- Wed Mar  7 14:11:47 1990 <<<

Exposure does not seem to be even.  Parts of my specimen were very over-
developed, while adjacent areas appeared as if they had not een been
exposed.  The vacuum on for the chuck seemed to be okay, and I checked the
focus and manual exposure setting.

>>> 'canon' problem from liang -- Wed Mar  7 21:45:00 1990 <<<

The vacuum which holds the wafer to the sample chuck has 
some problem. When the sample is raised to contact with 
the wafer disk, it moves. Andy who also notice the same 
problem. 

>>> 'canon' problem from miklich -- Wed Mar  7 22:25:14 1990 <<<

I confirm the last user's problem.  It looks like the sample when placed on the new chuck (the one for irregular samples) moves as it is put into position
under the disk.  I tried simply raising the sample and then lowering it right
away and the sample had shifted by a few mm.  There was no visible motion of
the sample while it was going up or coming down, so I am left to conclude that
the sample moves as the vacuum is being applied, or perhaps just as it makes contact with the disk.  Note also that in order to see anything on the sample the
focus had to be put way off (886 for the new disk!).  Finally, the vacuum for
both chucks using the new disk was a bit low (~50cm Hg) with or without the
sample.

>>> 'canon' problem from kim -- Thu Mar  8 16:29:39 1990 <<<

Focus on the Std. disk changed to ~939 um.  The temp. of this room is at
26.2 C today.  Collidian had harden on the new wafer disk.  Cleaned the
new wafer disk, but when attempted to clean the gasket, the gasket strunk
and harden and the vacuum seal is bad.  New gasket need to be order.  
Meanwhile only the standard wafer disk is usable.  

>>> 'canon' problem from bob -- Fri Mar  9 16:06:22 1990 <<<

The canon wafer disc has been cleaned of collodion and a new gasket
has been installed on the chuck. The canon is now useable.

Due to problems with the air conditioning associated with Y-1 we
will not do a focus exposure matrix to determine optimum focus.
The room is varying in temp about +- 2C which will vary the canon
focus. Users are notified that focus may change slightly from normal.
The AC will be serviced on Monday.

The canon is up for use with the above exception.

>>> 'canon' problem from missert -- Fri Mar 23 12:42:32 1990 <<<

I enabled the canon then noticed that the lamp was out. I then disabled
the canon and got a message that it was not "officially enabled"? In any
case, the green light that shows it is enabled is on, but I am not able
to disable it!

>>> 'canon' problem from evan -- Fri Mar 23 13:00:38 1990 <<<

problem: lamp off
cause: power glitchs in building?
solution: restarted lamp

>>> 'canon' problem from evan -- Fri Mar 23 13:11:59 1990 <<<

problem: canon wouldn't ddisable
cause: computer filespace full
solution: smiles corrected whatever was needed..disabled canon with normal
results
canon is up

>>> 'canon' problem from palantir -- Mon Mar 26 18:29:49 1990 <<<


had problem getting focus

>>> 'canon' problem from missert -- Mon Mar 26 18:54:22 1990 <<<

ican't get a uniform focus accross a 2 in. wafer - positions 3, 7, and 9 are
fine using a 964 focus (I CAN GET 2 MICRON FEATURES) but all other positions
are grossly out of focus - i.e. they behave as if they've barely been
exposed.  I was using the old "standard" disk.  The thermometer in the
room reads 21 C.

>>> 'canon' problem from missert -- Mon Mar 26 18:59:57 1990 <<<

Note - although I cannot get a uniform focus accross a 2 in. wafer
according to the features I end up with after developing, at each
position the pattern on wafer (which I can see from the previous
layer) appears to be in focus to the eye through the microscope.

>>> 'canon' problem from evan -- Tue Mar 27 07:56:05 1990 <<<

The focus problems do not appear to be due to the piston height or
dragging of turntable bearings. Marilyn is going to do a new focus test now that the room temperature is normal.  She will report results when testing is completed.

>>> 'canon' problem from marilyn -- Tue Mar 27 11:38:37 1990 <<<

Problem: Focus/exposure matrix tests needed for both old and new disks.
Solution: Focus/exposure matrix tests performed- using a coarse and then
          fine array- for both disks.

         New focus for the old disk: 973
         New focus for the new disk: 967

>>> 'canon' problem from palantir -- Tue Mar 27 15:49:39 1990 <<<


The print lens seems to be randomly sticking, sometimes the exposure woprks and sometimes it is so out of focuss that I cant even print a 100 micron line. Also, there are often ghost images.

>>> 'canon' problem from bob -- Tue Mar 27 16:00:55 1990 <<<

A call has been placed to canon for field service. Users
report focus problems that are random in nature. The canon
is useable; however, problems with focus may occurr. When
canon returns our call a date will be announced for repair.
We have requested a rapid response.
~

>>> 'canon' problem from evan -- Wed Mar 28 09:12:24 1990 <<<

The erratic focus problem is being caused by the microscope moving
during exposure.  When the scope is retracted, the lens is switched
for exposure.  A scope 'out' position retaining device has failed
and was allowing to scope to move in a bit.  This was causing the
lens to switch during exposure.  
While this is being repaired, the canon will work if you slide the scope
out very carefully and release it lightly.  You should watch to see
if it is moving in.  The place to watch is the microswitch on the left
slide bearing of the scope track.  Try it while in STROKE SETTING to
see if the scope is moving enough to deactivate the switch.  If so,
report this and do not expose your wafer.
.

>>> 'canon' problem from evan -- Wed Mar 28 14:06:16 1990 <<<

problem: erratic focus
cause: lens switching during exposure. see previous report
solution: repaired microscope slide position retainer. reinstalled
and adjusted for proper locking at both in and out positions.

canon is up

>>> 'canon' problem from miklich -- Wed Mar 28 18:26:21 1990 <<<

There is a blob of something on the glass plate of the new disk.  It is
on the side of the glass which makes contact with the sample, and I 
have noticed that dummy Si wafers tend to stick to this blob when raised
into place.  I did *not* attampt to clean the disk (except to blow it off
with the air gun).

>>> 'canon' problem from palantir -- Wed Mar 28 20:07:30 1990 <<<


the new disk needs to be cleaned. There is a large spot of something on it, as reported by the previous user.

>>> 'canon' problem from evan -- Thu Mar 29 16:39:11 1990 <<<

The new disk glass has been cleaned.

>>> 'canon' problem from cleland -- Thu Mar 29 18:09:23 1990 <<<

The lock bearing (or whatever it's called) on the alignment microscope,
the one that was replaced a couple of days ago, is starting to get a
little bit stiff -- it's getting hard to pull the scope out and then
push it back in. The Canon is still completely useable.

>>> 'canon' problem from denlinge -- Sat Mar 31 02:03:27 1990 <<<

I did not find it usable at all.  The eyepeice would not pull out.
I do not think it should be used until staff looks at it.

>>> 'canon' problem from evan -- Mon Apr  2 08:46:47 1990 <<<

parrish is machining a new mounting plate for the alignment scope position
index pin assy.  The canon should be repaired by 10:30 today.

>>> 'canon' problem from evan -- Mon Apr  2 13:08:38 1990 <<<

The mounting plate/ index pin has been reinstalled.
Users should continue to slide the alignment scope in and out with
a light touch.
canon is up

>>> 'canon' problem from miklich -- Mon Apr  2 23:07:15 1990 <<<

When I came to use the canon, I found the new disk *stuck* to the rubber on
the bottom of the holding rack. I removed it with some force, but in the
process some rubber tore and is still on the end of the disk.  

The disk needs to be cleaned of the rubber.  I don't know how this happened,
but I suspect that someone was trying to clean the disk and got some solvent
on the end of the disk.

The canon is still useable. The disk seats well and I get good vacuum using
the new chuck (the old chuck has only ~45 cm Hg).  However, steps need to be
taken to ensure this does not happen again.

>>> 'canon' problem from evan -- Tue Apr  3 08:46:06 1990 <<<

problem:silicon rubber on new disk
solution: cleaned it off.  since I was the last person to clean the disk,
it is possible that a drop of methenol remained after wiping the vac seal.
I do not know why this would corrode the silicone pad unless it was already
worn from use.

>>> 'canon' problem from miklich -- Fri Apr  6 12:05:46 1990 <<<

Two problems:

The old disk gives very bad vacuum with either the new or old chucks (45 cm Hg).Someone should see if this can be improved.


There is a mark on the face of the glass plate for the new disk.  It looks like a streak of metal.  Is there some way to clean this?

>>> 'canon' fix from evan -- Fri Apr  6 15:04:45 1990 <<<

The new disk was cleaned.  There were spots of resist stuck on the dummy
wafer.  This was cleaned.

>>> 'canon' fix from evan -- Fri Apr  6 15:12:02 1990 <<<

The vac gasket was cleaned on the old disk.  vacuum seems ok.

canon is up

>>> 'canon' problem from cleland -- Fri Apr 13 15:44:05 1990 <<<

Wafer disk not loading up properly, getting poor vacuum and 
focus. 

>>> 'canon' fix from evan -- Fri Apr 13 16:49:10 1990 <<<

problem: wafer disk not loading
cause: lifting piston out of adjustment
solution: adjusted piston height and tightened locking ring

canon is up
