>>> 'as200' problem from galewski -- Mon Jan  1 22:05:30 1990 <<<

It sort of is working now and since I need it badly please do
not try to fix it right away.

It does scan now without tapping the stage but the stylus forces
displayed are either 1-4 mg or >25 mg.  It does also take longer
than usual to detect stage up, and initiating a scan.  Values
for measured step height are ok though.  My own standard sample
measures the same as before.

			-Carl

>>> 'as200' problem from bob -- Wed Jan  3 14:38:48 1990 <<<

as200 is having trouble with the actuation of the scan. It seems
the pressure established during the set up is not the pressure
that appears in automated measurements. 
This serves as a test to see if it routes to Evan.

>>> 'as200' problem from evan -- Mon Jan  8 16:58:29 1990 <<<

The drive belt for the table lift appears to be loose/stretched.  This may
be the cause for the erratic measurements of stylus pressure.  I will contact
the factory to see about belt adjustment or replacement.
Since the as200 is still giving good measurement results and galewski is
in the middle of a critical set of measurements, no further action was taken.

>>> 'as200' problem from galewski -- Wed Jan 24 23:06:43 1990 <<<

Still gives belivable readings most of the time, but has
started to make a whirring noise when moving the stylus.
This noise was not noticeable before.  Maybe a preventive
service call?

>>> 'as200' problem from bob -- Thu Feb  1 13:21:12 1990 <<<

The as200 is not tracking at it's stated force. It remains operational
and produces reliable profiles. Its problem will be looked into shortly.

>>> 'as200' problem from bob -- Thu Feb  1 16:22:32 1990 <<<

John Reilly of Tencor insturments will be here on Tuesday to look over our
machine. He will check it over for a damage pivot. In the meantime, it
is useable.

>>> 'as200' problem from bob -- Mon Feb  5 16:44:21 1990 <<<

John Reilly of Tencor insturments will be here @ 10:30-11:00
with to check out our as200. If it needs repair, he will have a loaner
with him. 

>>> 'as200' problem from evan -- Tue Feb  6 11:48:57 1990 <<<

Our as200 has been sent to the factory for service.  In it's place is a
loaner from Tencor.  It is not in ideal condition but should still work
for most needs.  The microlab's unit will be returned in 5-10 working days.

>>> 'as200' problem from aplee -- Wed Feb  7 22:38:20 1990 <<<

platform for wafer seems to be tilted, when I turn the x-y knobs for
transverse motion, it will actually rotate the wafer since it is pinned
by the upper lid. I am afraid the wafer might get scratched this way.

However, if you spin the platform to certain orientations, you may be able 
to avoid the problem, but either way, you have to avoid having certain parts
of the upper lid to hang over any part of your wafer. 

>>> 'as200' problem from yonkoski -- Fri Feb  9 14:07:52 1990 <<<

wafers were getting stuck by the housing?.  This problem was reported 
eariler.

>>> 'as200' problem from evan -- Fri Feb  9 14:56:58 1990 <<<

reattached plastic housing so that it will clear the wafer.  since this is
a loaner unit, users should keep an eye out for such malfunctions.

as200 is up

>>> 'as200' problem from bob -- Mon Feb 12 14:05:32 1990 <<<

Tencor has worked 2 days on our as200 without success. The problem
has now been traced to the stage motor. Mr. Caprai, the field service
tech said, "they had never seen the association between the
stage motors and the LVDT sensor and cannot explain the
problem". Tencor is consulting with another Dept. in Texas
to gain insight. Mr. Caprai says they are not charging us
for all the time they put in as the problem has been so
bizarre and not solved by standard technics. He will call
back when he has more information.

>>> 'as200' problem from qian -- Mon Feb 12 14:52:15 1990 <<<

The waferholder stage moving mechanism dosn't work. Wafer has to be moved manualy.

>>> 'as200' problem from bob -- Mon Feb 12 15:03:02 1990 <<<

The lab has a "loaner" as200 available. It is a manual stage machine.
This machine was supplied by Tencor while our machine is repaired.

>>> 'as200' problem from bob -- Tue Feb 13 11:11:42 1990 <<<

The microlab as200 has been repaired. Stage problems, such as a loose
drive pulley and excess play in the forks under the stage were
corrected. The pivots in the stylus were also replaced.
Cost:
10 hrs labor = $1500.00
Pivots       = $ 579.52
tencor will make an appointment for the installation of our machine
shortly. It was pointed out to Tencor that a pulley should not become
loose under service and this is a QC problem from their manufacture.
They donated 5 of 15 hours of their labor after this dicsussion.

>>> 'as200' problem from bob -- Wed Feb 14 09:20:35 1990 <<<

The loaner as200 has been removed and is being returned to
Tencor Inst. 
Our as200 has been repaired and will be back in the lab by
early this afternoon.
as200 will be up by 13:00 today.

>>> 'as200' problem from bob -- Wed Feb 14 09:49:58 1990 <<<

The Microlab as200 will be picked up this afternoon and reinstalled
around 15:00. The "loaner" has been removed from the lab pending
return. Picking this unit up has been delayed as the Dept. truck
was mistakenly given to drafting in spite of our reservation causing
a 4 hr delay in picking up our unit.

>>> 'as200' problem from evan -- Thu Feb 15 11:25:51 1990 <<<

The microlab's as200 has returned.  I has undergone extensive repairs and
alignments.  All users will have to be requalified before this unit can be
enabled.
as200 is up

>>> 'as200' problem from galewski -- Sun Feb 18 20:04:10 1990 <<<

Still looses count on left to right wafer stage movements.  But 
stages position when it does not loose count completely is better.
Otherwise works fine, can live with this small problem if everything
else works.

			-Carl

>>> 'as200' problem from bob -- Tue Feb 20 15:08:39 1990 <<<

The loss of location when stepping the as200 to mulitiple sites
will be reported to Tecnor. Carl reports this only occasionally
occurs and is a minor annoyance. Other than this, the as200 is
working very well. I will suggest Debra add a 1X/week step heigth
check to the processing checks.

>>> 'as200' problem from nam -- Wed Feb 28 10:51:13 1990 <<<

Stylus force readings were changing during measurement.
At start it was 14 mg.  About 4 scans after, readings was 4 mg.
And then at the end of measurements, it went back to the 14 mg.

>>> 'as200' problem from bob -- Wed Feb 28 14:26:28 1990 <<<

The as200 seems to be operating correctly. Carl has been
written to ask for advice on the mg/stylus force variations
reported by nam.
The as200 is up for use.

>>> 'as200' problem from ried -- Fri Mar  2 21:57:27 1990 <<<

Printer is not working.  There was no paper in the machine when
I found it.  I put in a spare roll, but I cannot get the printer to work
or the paper to advance.

>>> 'as200' problem from ried -- Fri Mar  2 23:40:11 1990 <<<

Disregard my problem report on not printing.  Bill Tang was able to get
printer to work after another system reset.

>>> 'as200' problem from evan -- Fri Mar  9 14:07:57 1990 <<<

The as200 has been moved to a new location.  All functions are restored to
normal.
as200 is up

>>> 'as200' problem from guochun -- Wed Mar 14 12:36:00 1990 <<<

the as200 works fine, all the measurements can be done.
When we press "1", the table should move inward, but it didn't. I have to press
"NXT  ^ " keyboard to move the table in.

>>> 'as200' problem from bob -- Thu Mar 15 15:03:22 1990 <<<

The as200 occasionally hangs up when the needle drops. This is a repeat
of a previous problem. Tencor will be contacted. The as200 remains
up for use.

>>> 'as200' problem from bob -- Wed Mar 21 09:30:11 1990 <<<

Problem: User reports stylus lowers after start key is
hit but just sits on wafer without scanning. In
addition, a slight tap on the stage will intitiate the scan
but the stylus force will read far off of it's set point.
This happens less than 1 out of 10 times.

John Capri, of Tencor Serv suggests that the contacts under the
start key be cleaned. This is done by "popping off" the key.
In addition he says there is a software problem that comes
with the machine that causes this and the only remedy is hit
"table down" and the start again.

The contacts will be cleaned under the start switch by a
staff member.

If users notice more than an occasional problem they are 
requisted to report it under tencor-problems. 

The as200 is up.

>>> 'as200' problem from evan -- Wed Mar 28 16:00:38 1990 <<<

As per a suggestion from Tencor, the contacts of the start/stop switch
were cleaned. This was done to fix the problem of the stylus not starting
to move on a scan and 'sticking' to the wafer.  Please report if this
problem reoccurs.

as200 is up

>>> 'as200' problem from hebert -- Thu Mar 29 15:31:16 1990 <<<

The stylus doesn't move at times when it is in contact with the
wafer. The keyboard appears to "lock up" in that "table up/down"
and stage "right/left & in/out" do not respond. Tapping the stage
causes the stylus to move normally after the "start/stop" key has
been depressed. The problem may be from the stage moving upwards
and the stylus force being incorrect at times.

>>> 'as200' problem from voros -- Thu Mar 29 15:56:36 1990 <<<

The stylus is still sticking (see Heberts report). Tapping the stage
will release it. The insrument is up but use it carefully.

>>> 'as200' problem from voros -- Thu Mar 29 15:59:37 1990 <<<

The lock can be removed only by clearing the problem.

>>> 'as200' problem from voros -- Thu Mar 29 16:01:58 1990 <<<


The stylus is still sticking (see Hebert's report). Tapping the stage
will release it. The insrument is up but use it carefully.

>>> 'as200' problem from evan -- Mon Apr  2 12:50:18 1990 <<<

While attempting to adjust stylus force as part of the investigation
of the sticking problem, I discovered the adjustment screw doesn't line
up correctly.  John Capri from Tencor is comming by Tuesday a.m. to
fix this.  It might be the cause of the sticking as well.
Stylus force was increased from 13 to 16 mg.  

as200 is up (still might need LIGHT tap if it sticks. continue to report if
             this occurs since stylus force was increased)

>>> 'as200' problem from evan -- Tue Apr  3 10:10:51 1990 <<<

The as200 is being serviced by John Caprai from Tencor this morning.
Results and comments will be posted when he is finished.

>>> 'as200' problem from evan -- Tue Apr  3 14:01:58 1990 <<<

The repair of the as200 is complete.  The stylus force lever was relocated
to it's proper position.  The 'sticking' problem was due to a binding in the elevator mechanism.  This was disassembled, cleaned, and reassembled.  The system was checked for proper start operation and looks good.
as200 is up

>>> 'as200' problem from hebert -- Fri Apr  6 10:19:33 1990 <<<

The CRT image is distorted. I tapped the side of the housing and
the image improved. The printout however, was split: the upper
part of the screen printed on the bottom and the lower part 
of the screen printed on top of the paper.

>>> 'as200' problem from evan -- Fri Apr  6 15:58:55 1990 <<<

Problem reported of distorted video image and improper printing.
As of now, all is working correctly. Please report if you have
any printer or video problem.
as200 is up

>>> 'as200' problem from qian -- Thu Apr 12 14:22:57 1990 <<<

Sample table has difficulty with up-down motion sometimes. Then you have to 
reset it.

>>> 'as200' problem from weijie -- Thu Apr 12 14:38:09 1990 <<<


The problem reported earlier occured unpredictablly.

>>> 'as200' problem from qian -- Thu Apr 12 15:55:13 1990 <<<

The problem (table up-down movement problem) I reported earler didn't happen 
to me this time.

>>> 'as200' fix from evan -- Thu Apr 12 16:04:19 1990 <<<

reporting fix in order to clear lock

>>> 'as200' problem from evan -- Thu Apr 12 16:05:06 1990 <<<

Users reporting problem with raising and lowering table.  This will
be looked into.  I am not locking the as200 at this time.

>>> 'as200' problem from dchin -- Thu Apr 12 17:15:15 1990 <<<


The printer srewed up. It started printing Japanese characters. It also inverte~v

. It was also inverted (dark became bright).

>>> 'as200' problem from bierach -- Fri Apr 13 10:40:03 1990 <<<

Yes, the as200 has problems.  I couldn't get the table to come 
within an eighth of an inch from my sample.  

>>> 'as200' fix from hebert -- Fri Apr 13 10:48:34 1990 <<<

Tapping on the stage will "unlock/unlatch" the keyboard.

>>> 'as200' problem from bierach -- Fri Apr 13 11:03:35 1990 <<<

Printing is inverted-white on black.

>>> 'as200' problem from hebert -- Fri Apr 13 13:16:28 1990 <<<

Stage motion is not smooth as the stage moves IN. 

>>> 'as200' problem from evan -- Fri Apr 13 13:57:06 1990 <<<

The as200 will be returned to Tencor and a loaner installed next week.
Problems with stage motion continue.
as200 is usable for now.

>>> 'as200' problem from evan -- Mon Apr 16 09:50:03 1990 <<<

The as200 is being returned to the factory this morning.  A loaner unit
will be brought back early this afternoon.
as200 is unavailable

>>> 'as200' problem from yonkoski -- Mon Apr 16 09:58:09 1990 <<<

the stage was not working properly.
as the machine is about to leave for repairs I will not describe
the problem in detail
Also, there appears to be some crud stuck to the tip of the stylus.

>>> 'as200' problem from evan -- Mon Apr 16 14:09:17 1990 <<<

While the lab's as200 is in for repair, we have a loaner unit installed.
REMINDER: This unit has no pushbutton stage control.  Use the knobs on 
the left side of stage.  Also, there is no vacuum chuck.

>>> 'as200' problem from denlinge -- Sun Apr 22 16:34:45 1990 <<<

the needle was often reluctant to start and every time I printed it gave
a message saying the stylus force was too low
>>> 'as200' problem from hebert -- Mon Apr 23 10:19:19 1990 <<< [No Comment]

>>> 'as200' problem from hebert -- Mon Apr 23 10:19:51 1990 <<<

The stylus force is too low. The stylus doesn't stay on the substrate
when attempting to scan.

>>> 'as200' fix from evan -- Mon Apr 23 14:12:52 1990 <<<

problem: stylus force too low
solution: adjusted stylus force back to 14mg.  It looked like someone had
attempted to alter the force.  It was far out of range.  Users should not
attempt this adjustment.

>>> 'as200' problem from field -- Thu May  3 10:39:53 1990 <<<

When I try to print out my alphastep traces, the screen "freaks out",
flashing brightly - the printout of the screen is pretty useless
because of this - I'm leaving an example by the machine.

Sigh...  When is the real alphastep coming home????

>>> 'as200' fix from evan -- Thu May  3 11:02:26 1990 <<<

problem: odd printout
solution: powered unit down and back up to reset everything.
          reset print option to 'screen'
          printout now appears normal
as200 is up

>>> 'as200' problem from evan -- Mon May  7 08:40:36 1990 <<<

paul nelson will be driving to Tencor this morning to exchange the as200
for our repaired unit.  There will be no as200 from 9:45 to 13:30 today.
>>> 'as200' problem from missert -- Mon May  7 13:47:46 1990 <<< [No Comment]

>>> 'as200' fix from evan -- Mon May  7 16:12:23 1990 <<<

Our repaired as200 has returned.  It has a new table and chuck.
The vacuum doesn't seem to distort the wafer as much as the old chuck.

have fun
as200 is up

>>> 'as200' problem from hyeh -- Fri May 11 15:36:27 1990 <<<

The printer paper got stuck.  Debra helped me pull it out.  I think it 
works now.
