Date: Tuesday, 14-Jan-97 21:39:06 GMT Server: NCSA/1.3 MIME-version: 1.0 Content-type: text/html Last-modified: Friday, 13-Dec-96 18:39:20 GMT Content-length: 6008
DTM: Capabilities and Facilities

The University of Michigan DTM Center builds its foundations upon many years of basic and applied research activities in IC processing and design, electronic device design, solid-state electronic and electro-optic materials research, industrial simulation and modeling, and electronics manufacturing in investigating the various issues confronting the design and production of flat panel displays.

The DTM Center directly uses facilities, laboratories, and infrastructure, built up over many decades. These include clean room facilities like the Solid-State Electronics Laboratory (SSEL) or research centers that span electronics manufacturing, sensors technology, plasma processing, or materials reserach.

The laboratory facilities for DTM include the SSEL clean room, the new Electronics Manufacturing Laboratory(EML) clean room, and numerous laboratories located in the College of Engineering.


Solid-State Electronics Laboratory:


SSEL houses a $25 million, 6000 square-foot, class 100 clean room facility, the product of a decade of investment in solid-state semiconductor faculty , research staff, and facilities. Years of consistent state funding, leveraged with federal grants and contracts, have helped the facility evolve into the most modern and complete in the United States for solid-state device research. It is a complete silicon IC and III-V compound device laboratory with facilities that include electron beam lithography, device and circuits characterization, chemical vapor deposition, dry etching, vacuum deposition and CAD facilities.

View of the SSEL at the University of Michigan. Click on the photo to link to more info on the SSEL and other EECS Dept research.


Center for Integrated Sensors and Circuits:


CISC was created to foster increased integration among the many individuals at the University of Michigan engaged in research on sensing, data acquisition, and advanced signal processing. Located in the Solid-State Electronics Lab, C ISC maintains world-class process facilities for the fabrication of integrat ed sensing systems. Current research includes work on materials processing and characterization, three-dimensional microstructures, modeling, high-performance interface circuits, biosensors, integrated optoelectronic systems, and microactuators.


Electronics Manufacturing and Control Systems:


EMACS is a ten year old interdisciplinary activity that has a strong university/industrial research mission in the areas of sensor-based manu facturing, intelligent equipment, and factory automation. EMACS serves as an important umbrella organization to infuse new manufacturing research into the DTM Center.

The EMACS major programs include:

Expertise for t hese programs is drawn from the College of Engineering's departments of Electrical Engineering and Computer Science, Chemical Engineering, Nuclear Engineering, Industrial and Operations Engineering, Materials Science and Engineering, Mechanical Enginee ring and Applied Mechanics, as well as the departments of Statistics, Physics, and Chemistry in the College of Literature, Science and the Arts.


Collabratory at :


The University of Michigan and the Environmental Research Institute of Michigan have created an alliance to foster the development of new technologies in the Greater Ann Arbor Area. This "colla bratory", located on ERIM's main campus is adjacent to The Center for Display Technology & Manufacturing. Leveraging the unique assets and strengths of both institutions, the lab seeks to form new business linkages with both start-up and established global companies involved in a full spectrum of related programs and activities, including:

The current 8000 SF, single-story building wing houses a variety of suites of office and lab space.


Electronics Manufacturing Laboratory (EML):



EML is a new $10 million, 3,000 square-foot class 10 and 100 clean room facility. It provides a state-of-the-art laboratory environment for focused research on the design, development, and manufacture of flat panel displays. Plasma etching and deposition, plasma diagnostics, thin film characterization, liquid crystal processing and process control equipment are housed in EML. The laboratory is also used to demonstrate state-of-the art fabrication equipment to our industrial partners.

Retur n to DTM Homepage

For General Information, Questions or Comments:dtm-info@umich.edu