Date: Tuesday, 14-Jan-97 21:39:06 GMT
Server: NCSA/1.3
MIME-version: 1.0
Content-type: text/html
Last-modified: Friday, 13-Dec-96 18:39:20 GMT
Content-length: 6008
DTM: Capabilities and Facilities

The
University of Michigan DTM Center builds its foundations upon many years
of basic and applied research activities in IC processing and design,
electronic device design,
solid-state electronic and electro-optic materials research, industrial
simulation and
modeling, and electronics manufacturing in investigating
the various issues
confronting the design and production of flat panel
displays.
The DTM Center directly uses facilities, laboratories, and
infrastructure, built up over many decades. These include clean room
facilities like the Solid-State Electronics
Laboratory (SSEL) or research centers that span electronics manufacturing,
sensors technology, plasma processing, or materials reserach.
The
laboratory facilities for DTM include the SSEL clean room, the new
Electronics Manufacturing Laboratory(EML) clean room, and numerous
laboratories located in the College of Engineering.
Solid-State Electronics Laboratory:
SSEL houses a $25 million, 6000
square-foot, class 100 clean room facility, the product
of a decade of investment in solid-state semiconductor faculty , research staff, and
facilities. Years of consistent state funding, leveraged with federal grants and contracts,
have helped the
facility evolve into the most modern and complete in the United States
for solid-state device research. It is a complete silicon IC and III-V
compound device laboratory with facilities that include electron beam
lithography, device and circuits characterization, chemical vapor
deposition, dry etching, vacuum deposition and CAD facilities.
View of the SSEL at the University of Michigan.
Click on the photo to link to more info on the SSEL and other EECS Dept research.
Center for Integrated Sensors and Circuits:
CISC was created to foster increased integration among the many individuals at the University of Michigan engaged
in research on sensing, data acquisition, and advanced signal processing. Located in the Solid-State Electronics Lab, C
ISC maintains world-class process facilities for the fabrication of integrat
ed sensing systems. Current research
includes work on materials processing and characterization, three-dimensional microstructures, modeling, high-performance
interface circuits, biosensors, integrated optoelectronic systems, and microactuators.
Electronics Manufacturing and Control Systems:
EMACS is a ten year old interdisciplinary activity that has a strong university/industrial
research mission in the areas of sensor-based manu
facturing, intelligent equipment, and
factory automation. EMACS serves as an important umbrella organization to infuse new
manufacturing research into the DTM Center.
The EMACS major programs include:
- SRC Center of Excellence in Autom
ated Semiconductor Manufacturing
- ARPA-funded Sensor Based Manufacturing Project
- SEMATECH Advanced Equipment Controller Project
- NSF Manufacturing Education & Research
- NSF Real-time Control of Plasma Etching
Expertise for t
hese programs is drawn from the College of Engineering's departments
of Electrical Engineering and Computer Science, Chemical Engineering, Nuclear Engineering,
Industrial and Operations Engineering, Materials Science and Engineering, Mechanical
Enginee
ring and Applied Mechanics, as well as the departments of Statistics, Physics,
and Chemistry in the College of Literature, Science and the Arts.
Collabratory at
:
The University of Michigan and the Environmental Research Institute of Michigan have created an alliance
to foster the development of new technologies in the Greater Ann Arbor Area. This "colla
bratory",
located on ERIM's main campus is adjacent to The Center for
Display Technology & Manufacturing. Leveraging
the unique assets and
strengths of both institutions, the lab seeks to form new business linkages with both
start-up and established global companies involved in a full spectrum of related programs and activities,
including:
- Electronics & Optics Technologies
- Flat-panel Display Technologies
- New Display Materials & Vehicles
- Sensor-based Fabrication
Equipment
- Advanced Manufacturing Processes
- Market & Industry Analysis
- Technology Deployment & Commercialization
The current 8000 SF, single-story building wing houses a variety of suites of office and lab space.
Electronics Manufacturing Laboratory (EML):
EML is a new
$10 million, 3,000 square-foot class 10 and 100 clean room facility. It
provides a state-of-the-art laboratory environment for focused research
on the design, development, and manufacture of flat panel displays.
Plasma etching and deposition, plasma diagnostics, thin film
characterization, liquid crystal processing and process control
equipment are housed in EML. The laboratory is also used to demonstrate
state-of-the art fabrication equipment to our industrial partners.
Retur
n to DTM Homepage

For General Information, Questions or Comments:dtm-info@umich.edu